Capacitance–Voltage Fluctuation of Si<sub>x</sub>N<sub>y</sub>-Based Metal–Insulator–Metal Capacitor Due to Silane Surface Treatment

Capacitance–Voltage Fluctuation of Si<sub>x</sub>N<sub>y</sub>-Based Metal–Insulator–Metal Capacitor Due to Silane Surface Treatment

In this study, we analyze metal–insulator–metal (MIM) capacitors with different thicknesses of SixNy film (650 Å, 500 Å, and 400 Å) and varying levels of film quality to improve their capacitance density. SixNy thicknesses of 650 Å, 500 Å, and 400 Å are used with four different conditions, designate...

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Bibliographic Details
Main Authors: Tae-Min Choi, Eun-Su Jung, Jin-Uk Yoo, Hwa-Rim Lee, Sung-Gyu Pyo
Format: Article
Language:English
Published: MDPI AG 2024-09-01
Series:Micromachines
Subjects:
MIM
capacitors
metal–insulator–metal
electrical performance
Si<sub>x</sub>N<sub>y</sub>
cap density
Online Access:https://www.mdpi.com/2072-666X/15/10/1204

Internet

https://www.mdpi.com/2072-666X/15/10/1204

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