In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection
In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-01-01
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| Series: | Sensors |
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| Online Access: | https://www.mdpi.com/1424-8220/20/3/618 |
| _version_ | 1818001039668805632 |
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| author | Andi Setiono Maik Bertke Wilson Ombati Nyang’au Jiushuai Xu Michael Fahrbach Ina Kirsch Erik Uhde Alexander Deutschinger Ernest J. Fantner Christian H. Schwalb Hutomo Suryo Wasisto Erwin Peiner |
| author_facet | Andi Setiono Maik Bertke Wilson Ombati Nyang’au Jiushuai Xu Michael Fahrbach Ina Kirsch Erik Uhde Alexander Deutschinger Ernest J. Fantner Christian H. Schwalb Hutomo Suryo Wasisto Erwin Peiner |
| author_sort | Andi Setiono |
| collection | DOAJ |
| description | In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm<sup>3</sup> and 300 × 100 × 4 µm<sup>3</sup>, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m<sup>3</sup> and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference. |
| first_indexed | 2024-04-14T03:29:18Z |
| format | Article |
| id | doaj.art-a6dcd199812840e9b5aefb2cd003d49a |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T03:29:18Z |
| publishDate | 2020-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a6dcd199812840e9b5aefb2cd003d49a2022-12-22T02:15:01ZengMDPI AGSensors1424-82202020-01-0120361810.3390/s20030618s20030618In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass DetectionAndi Setiono0Maik Bertke1Wilson Ombati Nyang’au2Jiushuai Xu3Michael Fahrbach4Ina Kirsch5Erik Uhde6Alexander Deutschinger7Ernest J. Fantner8Christian H. Schwalb9Hutomo Suryo Wasisto10Erwin Peiner11Institute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyFraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, GermanyFraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, GermanySCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, AustriaSCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, AustriaGETec Microscopy GmbH, 1220 Vienna, AustriaInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, GermanyIn this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm<sup>3</sup> and 300 × 100 × 4 µm<sup>3</sup>, which refer to the 1st and 2nd types of cantilevers, respectively. For the first case, the cantilever is configured to detect the fundamental in-plane bending mode and is actuated using a resistive heater. Similarly, the second type of cantilever sensor is actuated using a meandering resistive heater (bimorph) and is designed for out-of-plane operation. We have successfully employed these two cantilevers to measure and monitor the changes of mass concentration of carbon nanoparticles in air, provided by atomizing suspensions of these nanoparticles into a sealed chamber, ranging from 0 to several tens of µg/m<sup>3</sup> and oversize distributions from ~10 nm to ~350 nm. Here, we deploy both types of cantilever sensors and operate them simultaneously with a standard laboratory system (Fast Mobility Particle Sizer, FMPS, TSI 3091) as a reference.https://www.mdpi.com/1424-8220/20/3/618mems piezoresistive cantilever sensorsdynamic modecarbon nanoparticleparticle mass measurement |
| spellingShingle | Andi Setiono Maik Bertke Wilson Ombati Nyang’au Jiushuai Xu Michael Fahrbach Ina Kirsch Erik Uhde Alexander Deutschinger Ernest J. Fantner Christian H. Schwalb Hutomo Suryo Wasisto Erwin Peiner In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection Sensors mems piezoresistive cantilever sensors dynamic mode carbon nanoparticle particle mass measurement |
| title | In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection |
| title_full | In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection |
| title_fullStr | In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection |
| title_full_unstemmed | In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection |
| title_short | In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection |
| title_sort | in plane and out of plane mems piezoresistive cantilever sensors for nanoparticle mass detection |
| topic | mems piezoresistive cantilever sensors dynamic mode carbon nanoparticle particle mass measurement |
| url | https://www.mdpi.com/1424-8220/20/3/618 |
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