Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region

Flat lens or metalens, as one of the most important application branches of metasurfaces, has recently been attracting significant research interest. Various reflective and transmissive metalenses have been demonstrated in the terathertz, infrared and visible wavelength range. However, metalens oper...

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Main Authors: Huifang Guo, Song Yue, Ran Wang, Yu Hou, Man Li, Kunpeng Zhang, Zichen Zhang
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Nanomaterials
Subjects:
Online Access:https://www.mdpi.com/2079-4991/11/5/1243
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author Huifang Guo
Song Yue
Ran Wang
Yu Hou
Man Li
Kunpeng Zhang
Zichen Zhang
author_facet Huifang Guo
Song Yue
Ran Wang
Yu Hou
Man Li
Kunpeng Zhang
Zichen Zhang
author_sort Huifang Guo
collection DOAJ
description Flat lens or metalens, as one of the most important application branches of metasurfaces, has recently been attracting significant research interest. Various reflective and transmissive metalenses have been demonstrated in the terathertz, infrared and visible wavelength range. However, metalens operating in the ultraviolet (UV) wavelength range is rare. Moreover, the development of reflective UV metalens, the important counterpart of transmissive ones, falls far behind. In this work, with thorough investigation of material properties, we propose a reflective metalens based on silicon dioxide (SiO<sub>2</sub>) and aluminum (Al) that operates in the vacuum ultraviolet (VUV) to visible wavelength region. Four reflective metalenses were designed and optimized for wavelengths of 193, 441, 532 and 633 nm, and prominent focusing capability was observed, especially for the VUV wavelength of 193 nm. Dispersion characteristics of the metalenses were also studied within ±50 nm of the design wavelength, and negative dispersion was found for all cases. In addition, the SiO<sub>2</sub> + Al platform can be, in principle, extended to the mid-infrared (IR) wavelength range. The reflective VUV metalens proposed in this work is expected to propel miniaturization and integration of UV optics.
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spelling doaj.art-a706444c6e1145e5805589f0b37d86782023-11-21T18:48:14ZengMDPI AGNanomaterials2079-49912021-05-01115124310.3390/nano11051243Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength RegionHuifang Guo0Song Yue1Ran Wang2Yu Hou3Man Li4Kunpeng Zhang5Zichen Zhang6Microelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaMicroelectronics Instruments and Equipment R&D Center, Institute of Microelectronics, Chinese Academy of Sciences, 3 Beitucheng West Road, Beijing 100029, ChinaFlat lens or metalens, as one of the most important application branches of metasurfaces, has recently been attracting significant research interest. Various reflective and transmissive metalenses have been demonstrated in the terathertz, infrared and visible wavelength range. However, metalens operating in the ultraviolet (UV) wavelength range is rare. Moreover, the development of reflective UV metalens, the important counterpart of transmissive ones, falls far behind. In this work, with thorough investigation of material properties, we propose a reflective metalens based on silicon dioxide (SiO<sub>2</sub>) and aluminum (Al) that operates in the vacuum ultraviolet (VUV) to visible wavelength region. Four reflective metalenses were designed and optimized for wavelengths of 193, 441, 532 and 633 nm, and prominent focusing capability was observed, especially for the VUV wavelength of 193 nm. Dispersion characteristics of the metalenses were also studied within ±50 nm of the design wavelength, and negative dispersion was found for all cases. In addition, the SiO<sub>2</sub> + Al platform can be, in principle, extended to the mid-infrared (IR) wavelength range. The reflective VUV metalens proposed in this work is expected to propel miniaturization and integration of UV optics.https://www.mdpi.com/2079-4991/11/5/1243metasurfacereflective metalensultravioletsilicon dioxidealuminum
spellingShingle Huifang Guo
Song Yue
Ran Wang
Yu Hou
Man Li
Kunpeng Zhang
Zichen Zhang
Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
Nanomaterials
metasurface
reflective metalens
ultraviolet
silicon dioxide
aluminum
title Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
title_full Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
title_fullStr Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
title_full_unstemmed Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
title_short Design of Polarization-Independent Reflective Metalens in the Ultraviolet–Visible Wavelength Region
title_sort design of polarization independent reflective metalens in the ultraviolet visible wavelength region
topic metasurface
reflective metalens
ultraviolet
silicon dioxide
aluminum
url https://www.mdpi.com/2079-4991/11/5/1243
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