System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

System Modeling of a MEMS Vibratory Gyroscope and Integration to Circuit Simulation

Recently, consumer applications have dramatically created the demand for low-cost and compact gyroscopes. Therefore, on the basis of microelectromechanical systems (MEMS) technology, many gyroscopes have been developed and successfully commercialized. A MEMS gyroscope consists of a MEMS device and a...

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Bibliographic Details
Main Authors: Hyukjin J. Kwon, Seyeong Seok, Geunbae Lim
Format: Article
Language:English
Published: MDPI AG 2017-11-01
Series:Sensors
Subjects:
MEMS
gyroscope
simulation
COMSOL
SPICE
Online Access:https://www.mdpi.com/1424-8220/17/11/2663

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