Summary: | A multispectral anti-reflective coating of high radiation strength for laser applications in the IR spectrum for nonlinear ZnGeP<sub>2</sub> crystals has been developed for the first time. The coating was constructed using YbF<sub>3</sub>/ZnS. The developed coating was obtained by a novel approach using ion-beam deposition of these materials on a ZnGeP<sub>2</sub> substrate. It has a high LIDT of more than 2 J/cm<sup>2</sup>. Optimal layer deposition regimes were found for high film density and low absorption, and good adhesion of the coating to the substrate was achieved. At the same time, there was no dissociation of the double compound under high-energy ions.
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