Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity o...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2020-08-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/20/17/4927 |
| Summary: | A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C. |
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| ISSN: | 1424-8220 |