Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor

A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity o...

Full description

Bibliographic Details
Main Authors: Xin Cheng, Jitendra Narayan Dash, Dinusha Serandi Gunawardena, Lin Htein, Hwa-Yaw Tam
Format: Article
Language:English
Published: MDPI AG 2020-08-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/20/17/4927
_version_ 1827707184000008192
author Xin Cheng
Jitendra Narayan Dash
Dinusha Serandi Gunawardena
Lin Htein
Hwa-Yaw Tam
author_facet Xin Cheng
Jitendra Narayan Dash
Dinusha Serandi Gunawardena
Lin Htein
Hwa-Yaw Tam
author_sort Xin Cheng
collection DOAJ
description A simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.
first_indexed 2024-03-10T16:41:01Z
format Article
id doaj.art-a7bf02d4e3e241c4b57a27973e09807a
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-03-10T16:41:01Z
publishDate 2020-08-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-a7bf02d4e3e241c4b57a27973e09807a2023-11-20T12:01:41ZengMDPI AGSensors1424-82202020-08-012017492710.3390/s20174927Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure SensorXin Cheng0Jitendra Narayan Dash1Dinusha Serandi Gunawardena2Lin Htein3Hwa-Yaw Tam4Department of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, ChinaDepartment of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, ChinaDepartment of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, ChinaDepartment of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, ChinaDepartment of Electrical Engineering, Photonics Research Centre, The Hong Kong Polytechnic University, Kowloon, Hong Kong 999077, ChinaA simple, compact, and highly sensitive gas pressure sensor based on a Fabry–Perot interferometer (FPI) with a silicone rubber (SR) diaphragm is demonstrated. The SR diaphragm is fabricated on the tip of a silica tube using capillary action followed by spin coating. This process ensures uniformity of its inner surface along with reproducibility. A segment of single mode fiber (SMF) inserted into this tube forms the FPI which produces an interference pattern with good contrast. The sensor exhibits a high gas pressure sensitivity of −0.68 nm/kPa along with a low temperature cross-sensitivity of ≈ 1.1 kPa/°C.https://www.mdpi.com/1424-8220/20/17/4927optical fiberFabry–Perot interferometer (FPI)gas pressure sensorsilicone rubber
spellingShingle Xin Cheng
Jitendra Narayan Dash
Dinusha Serandi Gunawardena
Lin Htein
Hwa-Yaw Tam
Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
Sensors
optical fiber
Fabry–Perot interferometer (FPI)
gas pressure sensor
silicone rubber
title Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_full Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_fullStr Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_full_unstemmed Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_short Silicone Rubber Based Highly Sensitive Fiber-Optic Fabry–Perot Interferometric Gas Pressure Sensor
title_sort silicone rubber based highly sensitive fiber optic fabry perot interferometric gas pressure sensor
topic optical fiber
Fabry–Perot interferometer (FPI)
gas pressure sensor
silicone rubber
url https://www.mdpi.com/1424-8220/20/17/4927
work_keys_str_mv AT xincheng siliconerubberbasedhighlysensitivefiberopticfabryperotinterferometricgaspressuresensor
AT jitendranarayandash siliconerubberbasedhighlysensitivefiberopticfabryperotinterferometricgaspressuresensor
AT dinushaserandigunawardena siliconerubberbasedhighlysensitivefiberopticfabryperotinterferometricgaspressuresensor
AT linhtein siliconerubberbasedhighlysensitivefiberopticfabryperotinterferometricgaspressuresensor
AT hwayawtam siliconerubberbasedhighlysensitivefiberopticfabryperotinterferometricgaspressuresensor