| Summary: | The past decades have witnessed a tremendous development of GaN-based power electronic devices grown on Si substrate. This article provides a concise introduction, review, and outlook of the research developments of GaN-on-Si power device technology. The comprehensive review has discussed the crucial issues in the state-of-the-art device technology based on both GaN materials epitaxy including stress control and point defects study, and device fabrication including normally off solutions like Cascode, trench MIS-gate, and p-GaN gate. Device reliability and other common fabrication issues in GaN high electron mobility transistors (HEMTs) are also discussed. Lastly, we give an outlook on the GaN-on-Si power devices from two aspects, namely high frequency, and high power GaN ICs, and GaN vertical power devices.
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