A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

A MEMS µ-Preconcentrator Employing a Carbon Molecular Sieve Membrane for Highly Volatile Organic Compound Sampling

This paper presents the synthesis and evaluation of a carbon molecular sieve membrane (CMSM) grown inside a MEMS-fabricated μ-preconcentrator for sampling highly volatile organic compounds. An array of µ-pillars measuring 100 µm in diameter and 250 µm in height were fabricated inside a microfluidic...

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Bibliographic Details
Main Authors: Hung-Yen Kuo, Wei-Riu Cheng, Tzu-Heng Wu, Horn-Jiunn Sheen, Chih-Chia Wang, Chia-Jung Lu
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Chemosensors
Subjects:
preconcentration
MEMS
VOCs
carbon molecular sieve membrane
Online Access:https://www.mdpi.com/2227-9040/9/5/104

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