Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability

Modeling vapor pressure is crucial for studying the moisture reliability of microelectronics, as high vapor pressure can cause device failures in environments with high temperature and humidity. To minimize the impact of vapor pressure, a super-hydrophobic (SH) coating can be applied on the exterior...

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Main Authors: Xuejun Fan, Liangbiao Chen, C.P. Wong, Hsing-Wei Chu, G.Q. Zhang
Format: Article
Language:English
Published: Elsevier 2015-09-01
Series:Engineering
Subjects:
Online Access:http://www.sciencedirect.com/science/article/pii/S2095809916300170
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author Xuejun Fan
Liangbiao Chen
C.P. Wong
Hsing-Wei Chu
G.Q. Zhang
author_facet Xuejun Fan
Liangbiao Chen
C.P. Wong
Hsing-Wei Chu
G.Q. Zhang
author_sort Xuejun Fan
collection DOAJ
description Modeling vapor pressure is crucial for studying the moisture reliability of microelectronics, as high vapor pressure can cause device failures in environments with high temperature and humidity. To minimize the impact of vapor pressure, a super-hydrophobic (SH) coating can be applied on the exterior surface of devices in order to prevent moisture penetration. The underlying mechanism of SH coating for enhancing device reliability, however, is still not fully understood. In this paper, we present several existing theories for predicting vapor pressure within microelectronic materials. In addition, we discuss the mechanism and effectiveness of SH coating in preventing water vapor from entering a device, based on experimental results. Two theoretical models, a micro-mechanics-based whole-field vapor pressure model and a convection-diffusion model, are described for predicting vapor pressure. Both methods have been successfully used to explain experimental results on uncoated samples. However, when a device was coated with an SH nanocomposite, weight gain was still observed, likely due to vapor penetration through the SH surface. This phenomenon may cast doubt on the effectiveness of SH coatings in microelectronic devices. Based on current theories and the available experimental results, we conclude that it is necessary to develop a new theory to understand how water vapor penetrates through SH coatings and impacts the materials underneath. Such a theory could greatly improve microelectronics reliability.
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spelling doaj.art-a876e87547644434852e16aa2675a8f42022-12-22T01:42:25ZengElsevierEngineering2095-80992015-09-011338439010.15302/J-ENG-2015034Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics ReliabilityXuejun Fan0Liangbiao Chen1C.P. Wong2Hsing-Wei Chu3G.Q. Zhang4Department of Mechanical Engineering, Lamar University, Beaumont, TX 77710, USADepartment of Mechanical Engineering, Lamar University, Beaumont, TX 77710, USASchool of Materials Science and Engineering, Georgia Tech, Atlanta, GA 30332-0245, USADepartment of Mechanical Engineering, Lamar University, Beaumont, TX 77710, USADelft University of Technology, Delft 2600 AA, the NetherlandsModeling vapor pressure is crucial for studying the moisture reliability of microelectronics, as high vapor pressure can cause device failures in environments with high temperature and humidity. To minimize the impact of vapor pressure, a super-hydrophobic (SH) coating can be applied on the exterior surface of devices in order to prevent moisture penetration. The underlying mechanism of SH coating for enhancing device reliability, however, is still not fully understood. In this paper, we present several existing theories for predicting vapor pressure within microelectronic materials. In addition, we discuss the mechanism and effectiveness of SH coating in preventing water vapor from entering a device, based on experimental results. Two theoretical models, a micro-mechanics-based whole-field vapor pressure model and a convection-diffusion model, are described for predicting vapor pressure. Both methods have been successfully used to explain experimental results on uncoated samples. However, when a device was coated with an SH nanocomposite, weight gain was still observed, likely due to vapor penetration through the SH surface. This phenomenon may cast doubt on the effectiveness of SH coatings in microelectronic devices. Based on current theories and the available experimental results, we conclude that it is necessary to develop a new theory to understand how water vapor penetrates through SH coatings and impacts the materials underneath. Such a theory could greatly improve microelectronics reliability.http://www.sciencedirect.com/science/article/pii/S2095809916300170vapor pressuremoisturesemiconductor reliabilitymicroelectromechanical systems (MEMS)super-hydrophobicnanocomposite coating
spellingShingle Xuejun Fan
Liangbiao Chen
C.P. Wong
Hsing-Wei Chu
G.Q. Zhang
Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
Engineering
vapor pressure
moisture
semiconductor reliability
microelectromechanical systems (MEMS)
super-hydrophobic
nanocomposite coating
title Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
title_full Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
title_fullStr Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
title_full_unstemmed Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
title_short Effects of Vapor Pressure and Super-Hydrophobic Nanocomposite Coating on Microelectronics Reliability
title_sort effects of vapor pressure and super hydrophobic nanocomposite coating on microelectronics reliability
topic vapor pressure
moisture
semiconductor reliability
microelectromechanical systems (MEMS)
super-hydrophobic
nanocomposite coating
url http://www.sciencedirect.com/science/article/pii/S2095809916300170
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