An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure

The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “f...

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Main Authors: Alexander Gagarin, Diana Tsyganova, Andrey Altynnikov, Andrey Komlev, Roman Platonov
Format: Article
Language:English
Published: MDPI AG 2024-01-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/24/3/755
_version_ 1797318272945750016
author Alexander Gagarin
Diana Tsyganova
Andrey Altynnikov
Andrey Komlev
Roman Platonov
author_facet Alexander Gagarin
Diana Tsyganova
Andrey Altynnikov
Andrey Komlev
Roman Platonov
author_sort Alexander Gagarin
collection DOAJ
description The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “ferroelectric film—substrate” structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate.
first_indexed 2024-03-08T03:50:03Z
format Article
id doaj.art-a8857d33af73430bb2d043c1017ac5d0
institution Directory Open Access Journal
issn 1424-8220
language English
last_indexed 2024-03-08T03:50:03Z
publishDate 2024-01-01
publisher MDPI AG
record_format Article
series Sensors
spelling doaj.art-a8857d33af73430bb2d043c1017ac5d02024-02-09T15:21:44ZengMDPI AGSensors1424-82202024-01-0124375510.3390/s24030755An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” StructureAlexander Gagarin0Diana Tsyganova1Andrey Altynnikov2Andrey Komlev3Roman Platonov4Department of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaThe split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “ferroelectric film—substrate” structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate.https://www.mdpi.com/1424-8220/24/3/755dielectric microwave parameterspermittivityloss tangentsplit-cylinder resonatorthin dielectric filmferroelectric film
spellingShingle Alexander Gagarin
Diana Tsyganova
Andrey Altynnikov
Andrey Komlev
Roman Platonov
An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
Sensors
dielectric microwave parameters
permittivity
loss tangent
split-cylinder resonator
thin dielectric film
ferroelectric film
title An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
title_full An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
title_fullStr An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
title_full_unstemmed An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
title_short An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
title_sort adaptation of the split cylinder resonator method for measuring the microwave properties of thin ferroelectric films in a thin film substrate structure
topic dielectric microwave parameters
permittivity
loss tangent
split-cylinder resonator
thin dielectric film
ferroelectric film
url https://www.mdpi.com/1424-8220/24/3/755
work_keys_str_mv AT alexandergagarin anadaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT dianatsyganova anadaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT andreyaltynnikov anadaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT andreykomlev anadaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT romanplatonov anadaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT alexandergagarin adaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT dianatsyganova adaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT andreyaltynnikov adaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT andreykomlev adaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure
AT romanplatonov adaptationofthesplitcylinderresonatormethodformeasuringthemicrowavepropertiesofthinferroelectricfilmsinathinfilmsubstratestructure