An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure
The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “f...
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MDPI AG
2024-01-01
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author | Alexander Gagarin Diana Tsyganova Andrey Altynnikov Andrey Komlev Roman Platonov |
author_facet | Alexander Gagarin Diana Tsyganova Andrey Altynnikov Andrey Komlev Roman Platonov |
author_sort | Alexander Gagarin |
collection | DOAJ |
description | The split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “ferroelectric film—substrate” structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate. |
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language | English |
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spelling | doaj.art-a8857d33af73430bb2d043c1017ac5d02024-02-09T15:21:44ZengMDPI AGSensors1424-82202024-01-0124375510.3390/s24030755An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” StructureAlexander Gagarin0Diana Tsyganova1Andrey Altynnikov2Andrey Komlev3Roman Platonov4Department of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaDepartment of Physical Electronics and Technology, Saint Petersburg Electrotechnical University “LETI”, ul. Professora Popova 5, St. Petersburg 197022, RussiaThe split-cylinder resonator method was adapted to measure the microwave properties (dielectric permittivity and loss tangent) of thin ferroelectric films on a dielectric substrate. The mathematical model for calculating the resonance frequency of the split-cylinder resonator was adjusted for the “ferroelectric film—substrate” structure. An approach for correcting the gap effect based on calibrating with a single-layer dielectric was introduced and used to study two-layer dielectrics. The prototype of a split-cylinder resonator designed to measure single-layer dielectric plates at a frequency of 10 GHz was presented. The resonator calibration was performed using dielectric PTFE samples and fused silica, and an example of the correction function was suggested. The measurement error was estimated, and recommendations on the acceptable parameter range for the material under investigation were provided. The method was demonstrated to measure the microwave properties of a ferroelectric film on a fused silica substrate.https://www.mdpi.com/1424-8220/24/3/755dielectric microwave parameterspermittivityloss tangentsplit-cylinder resonatorthin dielectric filmferroelectric film |
spellingShingle | Alexander Gagarin Diana Tsyganova Andrey Altynnikov Andrey Komlev Roman Platonov An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure Sensors dielectric microwave parameters permittivity loss tangent split-cylinder resonator thin dielectric film ferroelectric film |
title | An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure |
title_full | An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure |
title_fullStr | An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure |
title_full_unstemmed | An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure |
title_short | An Adaptation of the Split-Cylinder Resonator Method for Measuring the Microwave Properties of Thin Ferroelectric Films in a “Thin Film—Substrate” Structure |
title_sort | adaptation of the split cylinder resonator method for measuring the microwave properties of thin ferroelectric films in a thin film substrate structure |
topic | dielectric microwave parameters permittivity loss tangent split-cylinder resonator thin dielectric film ferroelectric film |
url | https://www.mdpi.com/1424-8220/24/3/755 |
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