X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons
In this work, the effect of proton irradiation on the change in the structure of silicon samples doped with platinum was studied. The samples were irradiated with protons at a dose of 9×1014 cm-2 with an energy of 600 keV and a current of 1÷1.5 μA. To determine the change in the structure after irr...
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| Format: | Article |
| Language: | English |
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V.N. Karazin Kharkiv National University Publishing
2023-06-01
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| Series: | East European Journal of Physics |
| Subjects: | |
| Online Access: | https://periodicals.karazin.ua/eejp/article/view/21581 |
| _version_ | 1797813392492199936 |
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| author | Sharifa B. Utamuradova Aliona V. Stanchik Dilmurod Rakhmanov |
| author_facet | Sharifa B. Utamuradova Aliona V. Stanchik Dilmurod Rakhmanov |
| author_sort | Sharifa B. Utamuradova |
| collection | DOAJ |
| description |
In this work, the effect of proton irradiation on the change in the structure of silicon samples doped with platinum was studied. The samples were irradiated with protons at a dose of 9×1014 cm-2 with an energy of 600 keV and a current of 1÷1.5 μA. To determine the change in the structure after irradiation, the methods of X-ray diffraction and atomic force microscopy were used. The obtained results indicate that doping with platinum does not lead to a modification of the cubic crystal structure of silicon, but only to minor changes in the structural characteristics and surface morphology. In this case, proton irradiation of a silicon single crystal with a dose of 9.0×1014 cm–2 with an energy of 600 keV leads to the formation of defects without the formation of an amorphous near-surface layer.
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| first_indexed | 2024-03-13T07:52:17Z |
| format | Article |
| id | doaj.art-a8eaba403f1445eeb3ec5275a65c2141 |
| institution | Directory Open Access Journal |
| issn | 2312-4334 2312-4539 |
| language | English |
| last_indexed | 2024-03-13T07:52:17Z |
| publishDate | 2023-06-01 |
| publisher | V.N. Karazin Kharkiv National University Publishing |
| record_format | Article |
| series | East European Journal of Physics |
| spelling | doaj.art-a8eaba403f1445eeb3ec5275a65c21412023-06-02T13:31:40ZengV.N. Karazin Kharkiv National University PublishingEast European Journal of Physics2312-43342312-45392023-06-01210.26565/2312-4334-2023-2-21X-Ray Structural Investigations Of n-Si<Pt> Irradiated with ProtonsSharifa B. Utamuradova0Aliona V. Stanchik1Dilmurod Rakhmanov2Institute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan, Tashkent, UzbekistanScientific-Practical Materials Research Centre NAS of Belarus, Minsk, BelarusInstitute of Semiconductor Physics and Microelectronics at the National University of Uzbekistan, Tashkent, Uzbekistan In this work, the effect of proton irradiation on the change in the structure of silicon samples doped with platinum was studied. The samples were irradiated with protons at a dose of 9×1014 cm-2 with an energy of 600 keV and a current of 1÷1.5 μA. To determine the change in the structure after irradiation, the methods of X-ray diffraction and atomic force microscopy were used. The obtained results indicate that doping with platinum does not lead to a modification of the cubic crystal structure of silicon, but only to minor changes in the structural characteristics and surface morphology. In this case, proton irradiation of a silicon single crystal with a dose of 9.0×1014 cm–2 with an energy of 600 keV leads to the formation of defects without the formation of an amorphous near-surface layer. https://periodicals.karazin.ua/eejp/article/view/21581Siliconplatinumdiffusiondopingirradiationproton |
| spellingShingle | Sharifa B. Utamuradova Aliona V. Stanchik Dilmurod Rakhmanov X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons East European Journal of Physics Silicon platinum diffusion doping irradiation proton |
| title | X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons |
| title_full | X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons |
| title_fullStr | X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons |
| title_full_unstemmed | X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons |
| title_short | X-Ray Structural Investigations Of n-Si<Pt> Irradiated with Protons |
| title_sort | x ray structural investigations of n si pt irradiated with protons |
| topic | Silicon platinum diffusion doping irradiation proton |
| url | https://periodicals.karazin.ua/eejp/article/view/21581 |
| work_keys_str_mv | AT sharifabutamuradova xraystructuralinvestigationsofnsiptirradiatedwithprotons AT alionavstanchik xraystructuralinvestigationsofnsiptirradiatedwithprotons AT dilmurodrakhmanov xraystructuralinvestigationsofnsiptirradiatedwithprotons |