Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering

Paraelectric/antiferroelectric/ferroelectric phase transformation in As-deposited ZrO2 thin films by the TiN capping engineering

Based on the engineering of the TiN capping layer, the tailoring of the crystalline phases and the paraelectric(PE)/antiferroelectric(AFE)/ferroelectric(FE) properties of nanoscale ZrO2 thin films are demonstrated without any post-annealing treatment. The capping by the TiN layer leads to the conver...

Full description

Bibliographic Details
Main Authors:	Chun-Yuan Wang, Chin-I Wang, Sheng-Han Yi, Teng-Jan Chang, Chun-Yi Chou, Yu-Tung Yin, Makoto Shiojiri, Miin-Jang Chen
Format:	Article
Language:	English
Published:	Elsevier 2020-10-01
Series:	Materials & Design
Subjects:	Antiferroelectricity and ferroelectricity Atomic layer deposition Phase transformation Zirconium oxide and titanium nitride Capping layer effect
Online Access:	http://www.sciencedirect.com/science/article/pii/S0264127520305554

Similar Items

Improvement of Resistance Change Memory Characteristics in Ferroelectric and Antiferroelectric (like) Parallel Structures
by: Wonwoo Kho, et al.
Published: (2023-01-01)

Ferroelectric-antiferroelectric mixed systems. Equation of state, thermodynamic functions
by: N.A.Korynevskii, et al.
Published: (2006-01-01)

Piezoelectric and functional properties of materials with coexisting ferroelectric and antiferroelectric phases
by: Valeriy Ishchuk, et al.
Published: (2018-08-01)

Unipolar Parity of Ferroelectric-Antiferroelectric Characterized by Junction Current in Crystalline Phase Hf<sub>1−x</sub>Zr<sub>x</sub>O<sub>2</sub> Diodes
by: Kuo-Yu Hsiang, et al.
Published: (2021-10-01)

Sharp Transformation across Morphotropic Phase Boundary in Sub‐6 nm Wake‐Up‐Free Ferroelectric Films by Atomic Layer Technology
by: Chun‐Ho Chuang, et al.
Published: (2023-11-01)

Wide Electrocaloric Temperature Range Induced by Ferroelectric to Antiferroelectric Phase Transition
by: Xiaohui Sun, et al.
Published: (2019-04-01)

Microwave Electrodynamic Study on Antiferroelectric Materials in a Wide Temperature Range
by: Pavel Astafev, et al.
Published: (2022-12-01)

Dipole glass parameter behaviour for ferro-antiferroelectric solid mixtures
by: M.A. Korynevskii, et al.
Published: (2013-03-01)

Ferroelectrics and antiferroelectrics/
by: 262697 Kanzig, Werner
Published: (1957)

Enhanced antiferroelectric-like relaxor ferroelectric characteristic boosting energy storage performance of (Bi0.5Na0.5)TiO3-based ceramics via defect engineering
by: Leiyang Zhang, et al.
Published: (2022-05-01)

Enhanced Ferroelectricity in Hf‐Based Ferroelectric Device with ZrO2 Regulating Layer
by: Yongkai Liu, et al.
Published: (2023-08-01)

Soft modes in ferroelectrics and antiferroelectrics/
by: 254929 Blinc, R., et al.
Published: (1974)

Ferroelectric [HfO2/ZrO2] Superlattices with Enhanced Polarization, Tailored Coercive Field, and Improved High Temperature Reliability
by: David Lehninger, et al.
Published: (2023-09-01)

A review of ferroelectric materials for high power devices
by: Sergey I. Shkuratov, et al.
Published: (2022-07-01)

Characteristics of Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Thin Films Prepared by Direct and Remote Plasma Atomic Layer Deposition for Application to Ferroelectric Memory
by: Da Hee Hong, et al.
Published: (2023-02-01)

High‐Throughput Exploration of Phase Evolution in (Pb1−XBaX)ZrO3 Thin Films
by: Peipei Su, et al.
Published: (2024-04-01)

Ferroelectric Polarization Enhancement in Hafnium-Based Oxides Through Capping Layer Engineering
by: Hsuan-Han Chen, et al.
Published: (2022-01-01)

High-Pressure Vibrational and Structural Studies of the Chemically Engineered Ferroelectric Phase of Sodium Niobate
by: Sanjay Kumar Mishra, et al.
Published: (2023-07-01)

Electrical characteristics of WSe2 transistor with amorphous BN capping layer
by: Zhanjie Lu, et al.
Published: (2022-07-01)

Combustion Synthesis of High Density ZrN/ZrSi<sub>2</sub> Composite: Influence of ZrO<sub>2</sub> Addition on the Microstructure and Mechanical Properties
by: Zaki I. Zaki, et al.
Published: (2022-02-01)

Switching and energy-storage characteristics in PLZT 2/95/5 antiferroelectric ceramic system
by: A. Peláiz-Barranco, et al.
Published: (2016-12-01)

Impact of Pre-Annealed ZrO<sub>2</sub> Interfacial Layer on the Ferroelectric Behavior of Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>
by: Xiaobo Yuan, et al.
Published: (2023-12-01)

Separate Kinetics of the Polar and Antiferrodistortive Order Parameters in the Antiferroelectric Transition of PbZr1-xTixO3 and the Influence of Defects
by: Cordero F., et al.
Published: (2015-04-01)

Improved Polarization‐Retention‐Endurance in Hf0.5Zr0.5O2 Films by ZrO2 Capping via Electrostatic Effects
by: Tingfeng Song, et al.
Published: (2024-03-01)

Phonon dispersion calculations using the Vaks model in antiferroelectric lead zirconate
by: D. A. Andronikova, et al.
Published: (2015-06-01)

Ferroelectricity emerging in strained (111)-textured ZrO2 thin films
by: Fan, Zhen, et al.
Published: (2016)

The Excellent Bending Limit of a Flexible Si-Based Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Ferroelectric Capacitor with an Al Buffer Layer
by: Xinyu Xie, et al.
Published: (2023-12-01)

Low-field energy storage enhancement in ferroelectric/paraelectric PbTiO3/SrTiO3 nanocomposites near antiferroelectric–ferroelectric transition region
by: Le Van Lich, et al.
Published: (2024-06-01)

Enhanced energy storage performance under low electric field in Sm3+ doped AgNbO3 ceramics
by: Jing Li, et al.
Published: (2022-03-01)

Direct Correlation of Ferroelectric Properties and Memory Characteristics in Ferroelectric Tunnel Junctions
by: Benjamin Max, et al.
Published: (2019-01-01)

Nanostructures formation in ferroelectrics in the process of phase transformation
by: V. Ishchuk, et al.
Published: (2014-10-01)

Properties of Antiferroelectric Mixtures Differing in the Amount of Added Racemate
by: Magdalena Urbańska, et al.
Published: (2024-01-01)

Raman Spectra of Bulk and Few-Layer GeSe From First-Principles Calculations
by: Yi-Feng Zhao, et al.
Published: (2021-09-01)

Temperature Dependence of the Spontaneous Polarization Near the Ferroelectric-Paraelectric Transition in NaNO2
by: Kuşoğlu Sarıkaya C., et al.
Published: (2013-02-01)

Demonstration of Reentrant Relaxor Ferroelectric Phase Transitions in Antiferroelectric-Based (Pb0.50Ba0.50)ZrO3 Ceramics
by: Bhadra P. Pokharel, et al.
Published: (2018-04-01)

Effects of Ti content on dielectric and energy storage properties of (Pb0.94La0.04)[(Zr0.70Sn0.30)1−xTix]O3 ferroelectric/antiferroelectric ceramics
by: Ran Xu, et al.
Published: (2016-12-01)

Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr:HfO<sub>2</sub> Ferroelectric Capacitor
by: Yejoo Choi, et al.
Published: (2022-05-01)

Microstructure of ZrB2–ZrN directionally solidified eutectic composite by arc-melting
by: Eric Jianfeng Cheng, et al.
Published: (2018-01-01)

Antiferroelectric PbSnO3 Epitaxial Thin Films
by: Yu‐Hong Lai, et al.
Published: (2022-12-01)

Enhanced Energy-Storage Performance of an All-Inorganic, Antiferroelectric, Thin-Film via Orientation Adjustments
by: Xiaolin Wang, et al.
Published: (2020-01-01)