Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry
In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2017-02-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/17/3/462 |
| _version_ | 1818015607623254016 |
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| author | Sabina Merlo Paolo Poma Eleonora Crisà Dino Faralli Marco Soldo |
| author_facet | Sabina Merlo Paolo Poma Eleonora Crisà Dino Faralli Marco Soldo |
| author_sort | Sabina Merlo |
| collection | DOAJ |
| description | In this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time. |
| first_indexed | 2024-04-14T07:00:28Z |
| format | Article |
| id | doaj.art-a90ce3f9f82e4cd1845bffda1676e3a8 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-14T07:00:28Z |
| publishDate | 2017-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-a90ce3f9f82e4cd1845bffda1676e3a82022-12-22T02:06:47ZengMDPI AGSensors1424-82202017-02-0117346210.3390/s17030462s17030462Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence ReflectometrySabina Merlo0Paolo Poma1Eleonora Crisà2Dino Faralli3Marco Soldo4Dipartimento di Ingegneria Industriale e dell’Informazione, Università degli Studi di Pavia, 27100 Pavia, ItalyDipartimento di Ingegneria Industriale e dell’Informazione, Università degli Studi di Pavia, 27100 Pavia, ItalyDipartimento di Ingegneria Industriale e dell’Informazione, Università degli Studi di Pavia, 27100 Pavia, ItalySTMicroelectronics, 20864 Agrate Brianza (MB), ItalySTMicroelectronics, 20010 Cornaredo (Mi), ItalyIn this work, we have applied optical low-coherence reflectometry (OLCR), implemented with infra-red light propagating in fiberoptic paths, to perform static and dynamic analyses on piezo-actuated glass micro-membranes. The actuator was fabricated by means of thin-film piezoelectric MEMS technology and was employed for modifying the micro-membrane curvature, in view of its application in micro-optic devices, such as variable focus micro-lenses. We are here showing that OLCR incorporating a near-infrared superluminescent light emitting diode as the read-out source is suitable for measuring various parameters such as the micro-membrane optical path-length, the membrane displacement as a function of the applied voltage (yielding the piezo-actuator hysteresis) as well as the resonance curve of the fundamental vibration mode. The use of an optical source with short coherence-time allows performing interferometric measurements without spurious resonance effects due to multiple parallel interfaces of highly planar slabs, furthermore selecting the plane/layer to be monitored. We demonstrate that the same compact and flexible setup can be successfully employed to perform spot optical measurements for static and dynamic characterization of piezo-MEMS in real time.http://www.mdpi.com/1424-8220/17/3/462optical low-coherence reflectometryoptical measurementsthin-film piezo-electric actuatornon-destructive testing |
| spellingShingle | Sabina Merlo Paolo Poma Eleonora Crisà Dino Faralli Marco Soldo Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry Sensors optical low-coherence reflectometry optical measurements thin-film piezo-electric actuator non-destructive testing |
| title | Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry |
| title_full | Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry |
| title_fullStr | Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry |
| title_full_unstemmed | Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry |
| title_short | Testing of Piezo-Actuated Glass Micro-Membranes by Optical Low-Coherence Reflectometry |
| title_sort | testing of piezo actuated glass micro membranes by optical low coherence reflectometry |
| topic | optical low-coherence reflectometry optical measurements thin-film piezo-electric actuator non-destructive testing |
| url | http://www.mdpi.com/1424-8220/17/3/462 |
| work_keys_str_mv | AT sabinamerlo testingofpiezoactuatedglassmicromembranesbyopticallowcoherencereflectometry AT paolopoma testingofpiezoactuatedglassmicromembranesbyopticallowcoherencereflectometry AT eleonoracrisa testingofpiezoactuatedglassmicromembranesbyopticallowcoherencereflectometry AT dinofaralli testingofpiezoactuatedglassmicromembranesbyopticallowcoherencereflectometry AT marcosoldo testingofpiezoactuatedglassmicromembranesbyopticallowcoherencereflectometry |