Laser processed semiconductors for integrated photonic devices -INVITED
We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with o...
| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2020-01-01
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| Series: | EPJ Web of Conferences |
| Online Access: | https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf |
| _version_ | 1818725789447749632 |
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| author | Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan |
| author_facet | Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan |
| author_sort | Peacock Anna C. |
| collection | DOAJ |
| description | We report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips. |
| first_indexed | 2024-12-17T21:47:53Z |
| format | Article |
| id | doaj.art-a90f4e1911a9412dbb4bbf4a18fe166f |
| institution | Directory Open Access Journal |
| issn | 2100-014X |
| language | English |
| last_indexed | 2024-12-17T21:47:53Z |
| publishDate | 2020-01-01 |
| publisher | EDP Sciences |
| record_format | Article |
| series | EPJ Web of Conferences |
| spelling | doaj.art-a90f4e1911a9412dbb4bbf4a18fe166f2022-12-21T21:31:24ZengEDP SciencesEPJ Web of Conferences2100-014X2020-01-012380100110.1051/epjconf/202023801001epjconf_eosam2020_01001Laser processed semiconductors for integrated photonic devices -INVITEDPeacock Anna C.0MacFarquhar Stuart J.1Franz Yohann2Runge Antoine F. J.3Mailis Sakellaris4Oo Swe Z.Mittal Vinita5Chong Harold M. H.6Aktas Ozan7Optoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonSchool of Electronics and Computer Science, University of SouthamptonSchool of Electronics and Computer Science, University of SouthamptonOptoelectronics Research Centre, University of SouthamptonWe report results of laser processing of amorphous silicon and silicon-germanium semiconductor materials for the production of integrated photonic platforms. As the materials are deposited and processed at low temperatures, they are flexible, low cost, and suitable for multi-layer integration with other photonic or electronic layers. We demonstrate the formation of waveguides via crystallization of pre-patterned silicon components and functional microstructures through crystallization and compositional tuning of silicon-germanium alloy films. These results open a route for the fabrication of high density, multi-functional integrated optoelectronic chips.https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf |
| spellingShingle | Peacock Anna C. MacFarquhar Stuart J. Franz Yohann Runge Antoine F. J. Mailis Sakellaris Oo Swe Z. Mittal Vinita Chong Harold M. H. Aktas Ozan Laser processed semiconductors for integrated photonic devices -INVITED EPJ Web of Conferences |
| title | Laser processed semiconductors for integrated photonic devices -INVITED |
| title_full | Laser processed semiconductors for integrated photonic devices -INVITED |
| title_fullStr | Laser processed semiconductors for integrated photonic devices -INVITED |
| title_full_unstemmed | Laser processed semiconductors for integrated photonic devices -INVITED |
| title_short | Laser processed semiconductors for integrated photonic devices -INVITED |
| title_sort | laser processed semiconductors for integrated photonic devices invited |
| url | https://www.epj-conferences.org/articles/epjconf/pdf/2020/14/epjconf_eosam2020_01001.pdf |
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