Surface Shape Evolution of Optical Elements during Continuous Polishing of Fused Quartz
Continuous polishing is the first choice for machining optical elements with a large aperture. The lubrication in the continuous polishing is an important factor affecting the surface quality of the optical elements. In this study, the lubrication system between the optic element and polishing lap w...
Main Authors: | , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-05-01
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Series: | Crystals |
Subjects: | |
Online Access: | https://www.mdpi.com/2073-4352/12/5/736 |