Design and Analysis of a Hybrid-Type RF MEMS Phase Detector in X-Band
In this paper, we have designed, analyzed, and characterized a hybrid-type MEMS device for X-band phase shift measurement. The signal related to a phase shift of the inputs is fractionally in-line coupled by a MEMS beam and delivered to a thermoelectric power sensor, where the phase is ultimately co...
Main Authors: | Juzheng Han, Dazhi Ding |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-05-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/13/5/786 |
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