The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine
In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-10-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/12/10/1261 |
| _version_ | 1797513842093195264 |
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| author | Young Chan Choi June Soo Kim Soon Yeol Kwon Seong Ho Kong |
| author_facet | Young Chan Choi June Soo Kim Soon Yeol Kwon Seong Ho Kong |
| author_sort | Young Chan Choi |
| collection | DOAJ |
| description | In this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors. |
| first_indexed | 2024-03-10T06:22:19Z |
| format | Article |
| id | doaj.art-a98c075422ee4cd39ffef4b6f5a4be96 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T06:22:19Z |
| publishDate | 2021-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-a98c075422ee4cd39ffef4b6f5a4be962023-11-22T19:12:29ZengMDPI AGMicromachines2072-666X2021-10-011210126110.3390/mi12101261The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind TurbineYoung Chan Choi0June Soo Kim1Soon Yeol Kwon2Seong Ho Kong3School of Electronic and Electrical Engineering, Kyungpook National University, Daegu 41566, KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu 41566, KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu 41566, KoreaSchool of Electronic and Electrical Engineering, Kyungpook National University, Daegu 41566, KoreaIn this paper we report on the improvement of performance by minimizing scallop size through deep reactive-ion etching (DRIE) of rotors in micro-wind turbines based on micro-electro-mechanical systems (MEMS) technology. The surface profile of an MEMS rotor can be controlled by modifying the scallop size of the DRIE surface through changing the process recipe. The fabrication of a planar disk-type MEMS rotor through the MEMS fabrication process was carried out, and for the comparison of the improvements in the performance of each rotor, RPM testing and open circuit output voltage experiments of stators and permanent magnets were performed. We found that the smooth etching profile with a minimized scallop size formed using DRIE results in improved rotation properties in MEMS-based wind turbine rotors.https://www.mdpi.com/2072-666X/12/10/1261turbinerotorbladeMEMSDRIEscallop |
| spellingShingle | Young Chan Choi June Soo Kim Soon Yeol Kwon Seong Ho Kong The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine Micromachines turbine rotor blade MEMS DRIE scallop |
| title | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
| title_full | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
| title_fullStr | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
| title_full_unstemmed | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
| title_short | The Improvement of Performance through Minimizing Scallop Size in MEMS Based Micro Wind Turbine |
| title_sort | improvement of performance through minimizing scallop size in mems based micro wind turbine |
| topic | turbine rotor blade MEMS DRIE scallop |
| url | https://www.mdpi.com/2072-666X/12/10/1261 |
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