Atomic Layer Deposition of Lithium–Nickel–Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries

Atomic Layer Deposition of Lithium–Nickel–Silicon Oxide Cathode Material for Thin-Film Lithium-Ion Batteries

Lithium nickelate (LiNiO<sub>2</sub>) and materials based on it are attractive positive electrode materials for lithium-ion batteries, owing to their large capacity. In this paper, the results of atomic layer deposition (ALD) of lithium–nickel–silicon oxide thin films using lithium hexam...

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Bibliographic Details
Main Authors: Maxim Maximov, Denis Nazarov, Aleksander Rumyantsev, Yury Koshtyal, Ilya Ezhov, Ilya Mitrofanov, Artem Kim, Oleg Medvedev, Anatoly Popovich
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Energies
Subjects:
atomic layer deposition
lithium–nickel–silicon oxide
Li-ion batteries
thin-film battery
cathode materials
Online Access:https://www.mdpi.com/1996-1073/13/9/2345

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