A suppression method of high frequency dynamics of absolute displacement sensors
An absolute displacement sensor has been proposed for anti-vibration. Until now, it has been shown that the absolute displacement sensor is effective as a feedback sensor. Then, we would like to apply the same sensor to semiconductor exposure apparatuses, however detection bandwidth is limited due t...
| Main Authors: | , |
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| Format: | Article |
| Language: | Japanese |
| Published: |
The Japan Society of Mechanical Engineers
2014-02-01
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| Series: | Nihon Kikai Gakkai ronbunshu |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/transjsme/80/810/80_2014dr0029/_pdf/-char/en |