Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry

TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits lo...

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Main Authors: Valentina Innocenzi, Svetlana B. Zueva, Francesco Vegliò, Ida De Michelis
Format: Article
Language:English
Published: MDPI AG 2021-08-01
Series:Energies
Subjects:
Online Access:https://www.mdpi.com/1996-1073/14/17/5340
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author Valentina Innocenzi
Svetlana B. Zueva
Francesco Vegliò
Ida De Michelis
author_facet Valentina Innocenzi
Svetlana B. Zueva
Francesco Vegliò
Ida De Michelis
author_sort Valentina Innocenzi
collection DOAJ
description TMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits long-lasting toxicity to aquatic systems. Despite this known toxicity, the authorities currently do not provide emission limits (i.e., discharge concentrations) for wastewater by EU regulation. The current scenario necessitates the study of the processes for industrial wastewater containing TMAH. This work aims to present a successful example of the treatment process for the degradation of TMAH waste solutions of the E&S industry. Research was conducted at the pilot scale, and the process feasibility (both technical and economic) and its environmental sustainability are demonstrated. This process, which treats three exhausted solutions with a high concentration of toxic substances, is considered to be innovative.
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spelling doaj.art-aa2d96ced84745a5b74ff19cadfa8f952023-11-22T10:33:12ZengMDPI AGEnergies1996-10732021-08-011417534010.3390/en14175340Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor IndustryValentina Innocenzi0Svetlana B. Zueva1Francesco Vegliò2Ida De Michelis3Department of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, ItalyDepartment of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, ItalyDepartment of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, ItalyDepartment of Industrial and Information Engineering and Economics, University of L’Aquila, Piazzale Ernesto Pontieri, Monteluco di Roio, 67100 L’Aquila, ItalyTMAH is quaternary ammonium salt, consists of a methylated nitrogen molecule, and is widely used in the electronics industry as a developer and silicon etching agent. This substance is toxic and fatal if ingested. It can also cause skin burns, eye damage, and organ damage. Moreover, TMAH exhibits long-lasting toxicity to aquatic systems. Despite this known toxicity, the authorities currently do not provide emission limits (i.e., discharge concentrations) for wastewater by EU regulation. The current scenario necessitates the study of the processes for industrial wastewater containing TMAH. This work aims to present a successful example of the treatment process for the degradation of TMAH waste solutions of the E&S industry. Research was conducted at the pilot scale, and the process feasibility (both technical and economic) and its environmental sustainability are demonstrated. This process, which treats three exhausted solutions with a high concentration of toxic substances, is considered to be innovative.https://www.mdpi.com/1996-1073/14/17/5340tetramethylammonium hydroxideindustrial and organic wastewaterE&S industrypilot scale activityaerobic treatmentchemical precipitation
spellingShingle Valentina Innocenzi
Svetlana B. Zueva
Francesco Vegliò
Ida De Michelis
Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
Energies
tetramethylammonium hydroxide
industrial and organic wastewater
E&S industry
pilot scale activity
aerobic treatment
chemical precipitation
title Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
title_full Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
title_fullStr Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
title_full_unstemmed Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
title_short Pilot-Scale Experiences with Aerobic Treatment and Chemical Processes of Industrial Wastewaters from Electronics and Semiconductor Industry
title_sort pilot scale experiences with aerobic treatment and chemical processes of industrial wastewaters from electronics and semiconductor industry
topic tetramethylammonium hydroxide
industrial and organic wastewater
E&S industry
pilot scale activity
aerobic treatment
chemical precipitation
url https://www.mdpi.com/1996-1073/14/17/5340
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AT francescoveglio pilotscaleexperienceswithaerobictreatmentandchemicalprocessesofindustrialwastewatersfromelectronicsandsemiconductorindustry
AT idademichelis pilotscaleexperienceswithaerobictreatmentandchemicalprocessesofindustrialwastewatersfromelectronicsandsemiconductorindustry