Segmented Control of Electrostatically Actuated Bimorph Beams
This research focused on improving the control and sensing of electrostatically actuated, large deflection bimorph beams for optical beam steering. Current iterations of designs utilize a ‘zipper’ beam and have demonstrated large deflection angles. However, with these devices precise control and def...
| Autors principals: | , , , |
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| Format: | Article |
| Idioma: | English |
| Publicat: |
MDPI AG
2017-08-01
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| Col·lecció: | Proceedings |
| Matèries: | |
| Accés en línia: | https://www.mdpi.com/2504-3900/1/4/306 |