Direct Deposition of CVD Diamond Layers on Top of GaN Membranes

Direct Deposition of CVD Diamond Layers on Top of GaN Membranes

We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method us...

Cur síos iomlán

Sonraí bibleagrafaíochta
Príomhchruthaitheoirí: Tibor Izsák, Gabriel Vanko, Milan Držík, Stephan Kasemann, Johann Zehetner, Marian Vojs, Bohumír Zaťko, Štěpán Potocký, Alexander Kromka
Formáid: Alt
Teanga:English
Foilsithe / Cruthaithe: MDPI AG 2020-12-01
Sraith:Proceedings
Ábhair:
GaN
diamond
CVD
MEMS
intrinsic stress
Rochtain ar líne:https://www.mdpi.com/2504-3900/56/1/35

Ar líne

https://www.mdpi.com/2504-3900/56/1/35

Míreanna comhchosúla