Direct Deposition of CVD Diamond Layers on Top of GaN Membranes
We present technological issues in the deposition of diamond films on gallium nitride (GaN) membranes. Many wrinkles and thicker diamond layers were observed at the membrane center and poor quality diamond outside the membrane area. The deflection of the membranes was analyzed by a bulging method us...
| Những tác giả chính: | , , , , , , , , |
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| Định dạng: | Bài viết |
| Ngôn ngữ: | English |
| Được phát hành: |
MDPI AG
2020-12-01
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| Loạt: | Proceedings |
| Những chủ đề: | |
| Truy cập trực tuyến: | https://www.mdpi.com/2504-3900/56/1/35 |