CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization
In case of typical chemical gas sensors reacted by gas adsorption on surface of anactive layer, it is difficult to detect some gases which have low chemical adsorption energylike inert gases. In this paper, we report a gas sensor using carbon nanotube(CNT) array aselectron emitters for the purpose o...
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| Format: | Article |
| Language: | English |
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MDPI AG
2006-05-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/6/5/503/ |
| _version_ | 1811186245985894400 |
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| author | Seongjeen Kim |
| author_facet | Seongjeen Kim |
| author_sort | Seongjeen Kim |
| collection | DOAJ |
| description | In case of typical chemical gas sensors reacted by gas adsorption on surface of anactive layer, it is difficult to detect some gases which have low chemical adsorption energylike inert gases. In this paper, we report a gas sensor using carbon nanotube(CNT) array aselectron emitters for the purpose of detecting these gases. Specifically, sensors werefabricated with applications of glass patterning by a sand-blast process and of anodicbonding between glass and silicon to improve the compactness of the structure and thereliability in process. The proposed sensor, based on an electrical discharge theory known asPaschen's law, worked by figuring the changes of dark discharge current and initialbreakdown voltage depending on the concentration and the identity of gases. In this work,air and Ar gases were examined and discussed. |
| first_indexed | 2024-04-11T13:42:14Z |
| format | Article |
| id | doaj.art-aab641f1ba624bc7b07f70003ee49f68 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:42:14Z |
| publishDate | 2006-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-aab641f1ba624bc7b07f70003ee49f682022-12-22T04:21:12ZengMDPI AGSensors1424-82202006-05-016550351310.3390/s6050503CNT Sensors for Detecting Gases with Low Adsorption Energy by IonizationSeongjeen KimIn case of typical chemical gas sensors reacted by gas adsorption on surface of anactive layer, it is difficult to detect some gases which have low chemical adsorption energylike inert gases. In this paper, we report a gas sensor using carbon nanotube(CNT) array aselectron emitters for the purpose of detecting these gases. Specifically, sensors werefabricated with applications of glass patterning by a sand-blast process and of anodicbonding between glass and silicon to improve the compactness of the structure and thereliability in process. The proposed sensor, based on an electrical discharge theory known asPaschen's law, worked by figuring the changes of dark discharge current and initialbreakdown voltage depending on the concentration and the identity of gases. In this work,air and Ar gases were examined and discussed.http://www.mdpi.com/1424-8220/6/5/503/carbon nanotubesgas sensorPaschen's lawionization. |
| spellingShingle | Seongjeen Kim CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization Sensors carbon nanotubes gas sensor Paschen's law ionization. |
| title | CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization |
| title_full | CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization |
| title_fullStr | CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization |
| title_full_unstemmed | CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization |
| title_short | CNT Sensors for Detecting Gases with Low Adsorption Energy by Ionization |
| title_sort | cnt sensors for detecting gases with low adsorption energy by ionization |
| topic | carbon nanotubes gas sensor Paschen's law ionization. |
| url | http://www.mdpi.com/1424-8220/6/5/503/ |
| work_keys_str_mv | AT seongjeenkim cntsensorsfordetectinggaseswithlowadsorptionenergybyionization |