Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development
Herein, novel neural network (NN) methods that improve prediction accuracy and reduce output variance of the optimized input in the gradient method for cross‐sectional data are proposed, and the variability evaluation approach of optimized inputs in the semiconductor process is suggested. Specifical...
| Հիմնական հեղինակներ: | , , , , , , , , , |
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| Ձևաչափ: | Հոդված |
| Լեզու: | English |
| Հրապարակվել է: |
Wiley
2023-09-01
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| Շարք: | Advanced Intelligent Systems |
| Խորագրեր: | |
| Առցանց հասանելիություն: | https://doi.org/10.1002/aisy.202300089 |