Accurate Prediction and Reliable Parameter Optimization of Neural Network for Semiconductor Process Monitoring and Technology Development
Herein, novel neural network (NN) methods that improve prediction accuracy and reduce output variance of the optimized input in the gradient method for cross‐sectional data are proposed, and the variability evaluation approach of optimized inputs in the semiconductor process is suggested. Specifical...
| Auteurs principaux: | , , , , , , , , , |
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| Format: | Article |
| Langue: | English |
| Publié: |
Wiley
2023-09-01
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| Collection: | Advanced Intelligent Systems |
| Sujets: | |
| Accès en ligne: | https://doi.org/10.1002/aisy.202300089 |