The balance scheme of trichlorosilane production process made in «EXCEL»
The balance scheme of trichlorosilane production based on hydrochlorination of elemental silicon was worked out with the use of Microsoft Excel. The scheme includes the following steps: synthesis of hydrogen chloride, synthesis of trichlorosilane, separation of vapor-gas mixture and purification of...
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| Format: | Article |
| Language: | Russian |
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MIREA - Russian Technological University
2010-06-01
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| Series: | Тонкие химические технологии |
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| Online Access: | https://www.finechem-mirea.ru/jour/article/view/970 |