Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography
<p>Abstract</p> <p>We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, comb...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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SpringerOpen
2011-01-01
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| Series: | Nanoscale Research Letters |
| Subjects: | |
| Online Access: | http://www.nanoscalereslett.com/content/6/1/449 |
| _version_ | 1797718906948812800 |
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| author | Kim Ki Seok Choi Byung-Yeon Pak Yusin Lee Kwang-Ho Jung Gun-Young |
| author_facet | Kim Ki Seok Choi Byung-Yeon Pak Yusin Lee Kwang-Ho Jung Gun-Young |
| author_sort | Kim Ki Seok |
| collection | DOAJ |
| description | <p>Abstract</p> <p>We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithography and phase-shift interference, was proposed. Hot-embossing method generated the photoresist patterns with vertical side walls which enabled phase-shift mask effect at the edge of patterns. Embossing temperature and relief height were crucial parameters for the successful TAHL process. Periodic holes with a diameter of 600 nm at a 1 μm-pitch incorporating 250 nm wide line-defects were obtained simultaneously.</p> |
| first_indexed | 2024-03-12T08:57:03Z |
| format | Article |
| id | doaj.art-abb134c32f054ece8dc4d60fffd06c68 |
| institution | Directory Open Access Journal |
| issn | 1931-7573 1556-276X |
| language | English |
| last_indexed | 2024-03-12T08:57:03Z |
| publishDate | 2011-01-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nanoscale Research Letters |
| spelling | doaj.art-abb134c32f054ece8dc4d60fffd06c682023-09-02T15:57:31ZengSpringerOpenNanoscale Research Letters1931-75731556-276X2011-01-0161449Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithographyKim Ki SeokChoi Byung-YeonPak YusinLee Kwang-HoJung Gun-Young<p>Abstract</p> <p>We have demonstrated simultaneous fabrication of designed defects within a periodic structure. For rapid fabrication of periodic structures incorporating nanoscale line-defects at large area, topographically assisted holographic lithography (TAHL) technique, combining the strength of hologram lithography and phase-shift interference, was proposed. Hot-embossing method generated the photoresist patterns with vertical side walls which enabled phase-shift mask effect at the edge of patterns. Embossing temperature and relief height were crucial parameters for the successful TAHL process. Periodic holes with a diameter of 600 nm at a 1 μm-pitch incorporating 250 nm wide line-defects were obtained simultaneously.</p>http://www.nanoscalereslett.com/content/6/1/449hot-embossingholographic lithographyphase-shift lithographyphotonic crystaldefect generation |
| spellingShingle | Kim Ki Seok Choi Byung-Yeon Pak Yusin Lee Kwang-Ho Jung Gun-Young Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography Nanoscale Research Letters hot-embossing holographic lithography phase-shift lithography photonic crystal defect generation |
| title | Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography |
| title_full | Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography |
| title_fullStr | Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography |
| title_full_unstemmed | Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography |
| title_short | Simultaneous fabrication of line defects-embedded periodic lattice by topographically assisted holographic lithography |
| title_sort | simultaneous fabrication of line defects embedded periodic lattice by topographically assisted holographic lithography |
| topic | hot-embossing holographic lithography phase-shift lithography photonic crystal defect generation |
| url | http://www.nanoscalereslett.com/content/6/1/449 |
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