Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub>
Monolayer MoS<sub>2</sub> has emerged as a highly promising candidate for next-generation electronics. However, the production of monolayer MoS<sub>2</sub> with a high yield and low cost remains a challenge that impedes its practical application. Here, a significant breakthro...
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| Format: | Article |
| Language: | English |
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MDPI AG
2023-08-01
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| Series: | Crystals |
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| Online Access: | https://www.mdpi.com/2073-4352/13/8/1275 |
| _version_ | 1797585062335610880 |
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| author | Zheng Wei Xingdong Sun Yongqing Cai Yao Liang Zhihua Zhang |
| author_facet | Zheng Wei Xingdong Sun Yongqing Cai Yao Liang Zhihua Zhang |
| author_sort | Zheng Wei |
| collection | DOAJ |
| description | Monolayer MoS<sub>2</sub> has emerged as a highly promising candidate for next-generation electronics. However, the production of monolayer MoS<sub>2</sub> with a high yield and low cost remains a challenge that impedes its practical application. Here, a significant breakthrough in the batch production of wafer-scale monolayer MoS<sub>2</sub> via chemical vapor deposition is reported. Notably, a single preparation process enables the growth of multiple wafers simultaneously. The homogeneity and cleanliness of the entire wafer, as well as the consistency of different wafers within a batch, are demonstrated via morphology characterizations and spectroscopic measurements. Field-effect transistors fabricated using the grown MoS<sub>2</sub> exhibit excellent electrical performances, confirming the high quality of the films obtained via this novel batch production method. Additionally, we successfully demonstrate the batch production of wafer-scale oxygen-doped MoS<sub>2</sub> films via in situ oxygen doping. This work establishes a pathway towards mass preparation of two-dimensional materials and accelerates their development for diverse applications. |
| first_indexed | 2024-03-11T00:01:33Z |
| format | Article |
| id | doaj.art-abe0763a75554a97afcbc04a79616d96 |
| institution | Directory Open Access Journal |
| issn | 2073-4352 |
| language | English |
| last_indexed | 2024-03-11T00:01:33Z |
| publishDate | 2023-08-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Crystals |
| spelling | doaj.art-abe0763a75554a97afcbc04a79616d962023-11-19T00:45:53ZengMDPI AGCrystals2073-43522023-08-01138127510.3390/cryst13081275Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub>Zheng Wei0Xingdong Sun1Yongqing Cai2Yao Liang3Zhihua Zhang4School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, ChinaSchool of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, ChinaShenzhen Institute for Quantum Science and Engineering, Southern University of Science and Technology, Shenzhen 518055, ChinaSchool of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, ChinaSchool of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, ChinaMonolayer MoS<sub>2</sub> has emerged as a highly promising candidate for next-generation electronics. However, the production of monolayer MoS<sub>2</sub> with a high yield and low cost remains a challenge that impedes its practical application. Here, a significant breakthrough in the batch production of wafer-scale monolayer MoS<sub>2</sub> via chemical vapor deposition is reported. Notably, a single preparation process enables the growth of multiple wafers simultaneously. The homogeneity and cleanliness of the entire wafer, as well as the consistency of different wafers within a batch, are demonstrated via morphology characterizations and spectroscopic measurements. Field-effect transistors fabricated using the grown MoS<sub>2</sub> exhibit excellent electrical performances, confirming the high quality of the films obtained via this novel batch production method. Additionally, we successfully demonstrate the batch production of wafer-scale oxygen-doped MoS<sub>2</sub> films via in situ oxygen doping. This work establishes a pathway towards mass preparation of two-dimensional materials and accelerates their development for diverse applications.https://www.mdpi.com/2073-4352/13/8/1275two-dimensional materialsbatch productionMoS<sub>2</sub>oxygen doping |
| spellingShingle | Zheng Wei Xingdong Sun Yongqing Cai Yao Liang Zhihua Zhang Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> Crystals two-dimensional materials batch production MoS<sub>2</sub> oxygen doping |
| title | Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> |
| title_full | Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> |
| title_fullStr | Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> |
| title_full_unstemmed | Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> |
| title_short | Batch Production of Wafer-Scale Monolayer MoS<sub>2</sub> |
| title_sort | batch production of wafer scale monolayer mos sub 2 sub |
| topic | two-dimensional materials batch production MoS<sub>2</sub> oxygen doping |
| url | https://www.mdpi.com/2073-4352/13/8/1275 |
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