Fabrication of a Robust In<sub>2</sub>O<sub>3</sub> Nanolines FET Device as a Biosensor Platform

Fabrication of a Robust In<sub>2</sub>O<sub>3</sub> Nanolines FET Device as a Biosensor Platform

Field-effect transistors (FETs) are attractive biosensor platforms for rapid and accurate detection of various analytes through surface immobilization of specific bio-receptors. Since it is difficult to maintain the electrical stability of semiconductors of sensing channel under physiological condit...

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Bibliographic Details
Main Authors: Zetao Zhu, Takao Yasui, Quanli Liu, Kazuki Nagashima, Tsunaki Takahashi, Taisuke Shimada, Takeshi Yanagida, Yoshinobu Baba
Format: Article
Language:English
Published: MDPI AG 2021-05-01
Series:Micromachines
Subjects:
In<sub>2</sub>O<sub>3</sub> nanolines
robust
field effect transistor
biosensor platform
Online Access:https://www.mdpi.com/2072-666X/12/6/642

Internet

https://www.mdpi.com/2072-666X/12/6/642

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