Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures
Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive...
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| Format: | Article |
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MDPI AG
2016-02-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/16/2/204 |
| _version_ | 1828113909834317824 |
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| author | Juan Ren Michael Ward Peter Kinnell Russell Craddock Xueyong Wei |
| author_facet | Juan Ren Michael Ward Peter Kinnell Russell Craddock Xueyong Wei |
| author_sort | Juan Ren |
| collection | DOAJ |
| description | Single crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive at the elevated temperature, the silicon structures must work in combination with other advanced materials, such as silicon carbide (SiC) or silicon on insulator (SOI), for improved performance and reduced cost. Hence, in order to extend the operating temperatures of existing SCS microstructures, this work investigates the mechanical behavior of pressurized SCS diaphragms at high temperatures. A model was developed to predict the plastic deformation of SCS diaphragms and was verified by the experiments. The evolution of the deformation was obtained by studying the surface profiles at different anneal stages. The slow continuous deformation was considered as creep for the diaphragms with a radius of 2.5 mm at 600 °C. The occurrence of plastic deformation was successfully predicted by the model and was observed at the operating temperature of 800 °C and 900 °C, respectively. |
| first_indexed | 2024-04-11T12:17:16Z |
| format | Article |
| id | doaj.art-acff1777713346b0acf563916ae9d148 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T12:17:16Z |
| publishDate | 2016-02-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-acff1777713346b0acf563916ae9d1482022-12-22T04:24:17ZengMDPI AGSensors1424-82202016-02-0116220410.3390/s16020204s16020204Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High TemperaturesJuan Ren0Michael Ward1Peter Kinnell2Russell Craddock3Xueyong Wei4School of Mechanical Engineering, Xi’An Jiaotong University, 28 West Xianning Road, Xi’An 710049, ChinaBirmingham City University, Birmingham B5 5JU, UKWolfson School of Mechanical, Electrical and Manufacturing Engineering, Loughborough University, Loughborough LE11 3UZ, UKGE Sensing & Inspection Technologies, Leicestershire LE6 0FH, UKSchool of Mechanical Engineering, Xi’An Jiaotong University, 28 West Xianning Road, Xi’An 710049, ChinaSingle crystal silicon (SCS) diaphragms are widely used as pressure sensitive elements in micromachined pressure sensors. However, for harsh environments applications, pure silicon diaphragms are hardly used because of the deterioration of SCS in both electrical and mechanical properties. To survive at the elevated temperature, the silicon structures must work in combination with other advanced materials, such as silicon carbide (SiC) or silicon on insulator (SOI), for improved performance and reduced cost. Hence, in order to extend the operating temperatures of existing SCS microstructures, this work investigates the mechanical behavior of pressurized SCS diaphragms at high temperatures. A model was developed to predict the plastic deformation of SCS diaphragms and was verified by the experiments. The evolution of the deformation was obtained by studying the surface profiles at different anneal stages. The slow continuous deformation was considered as creep for the diaphragms with a radius of 2.5 mm at 600 °C. The occurrence of plastic deformation was successfully predicted by the model and was observed at the operating temperature of 800 °C and 900 °C, respectively.http://www.mdpi.com/1424-8220/16/2/204single crystal siliconplastic deformationpressure sensormicrofabrication |
| spellingShingle | Juan Ren Michael Ward Peter Kinnell Russell Craddock Xueyong Wei Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures Sensors single crystal silicon plastic deformation pressure sensor microfabrication |
| title | Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures |
| title_full | Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures |
| title_fullStr | Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures |
| title_full_unstemmed | Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures |
| title_short | Plastic Deformation of Micromachined Silicon Diaphragms with a Sealed Cavity at High Temperatures |
| title_sort | plastic deformation of micromachined silicon diaphragms with a sealed cavity at high temperatures |
| topic | single crystal silicon plastic deformation pressure sensor microfabrication |
| url | http://www.mdpi.com/1424-8220/16/2/204 |
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