Dispersion of Heat Flux Sensors Manufactured in Silicon Technology

Dispersion of Heat Flux Sensors Manufactured in Silicon Technology

In this paper, we focus on the dispersion performances related to the manufacturing process of heat flux sensors realized in CMOS (Complementary metal oxide semi-conductor) compatible 3-in technology. In particular, we have studied the performance dispersion of our sensors and linked these to the ph...

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Bibliographic Details
Main Authors: Katir Ziouche, Pascale Lejeune, Zahia Bougrioua, Didier Leclercq
Format: Article
Language:English
Published: MDPI AG 2016-06-01
Series:Sensors
Subjects:
silicon
sensor
CMOS
heat flux
thermoelectric
dispersion
Online Access:http://www.mdpi.com/1424-8220/16/6/853

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