OBŢINEREA STRATURILOR AlN PE Si PRIN METODA HVPE ŞI CERCETAREA PROPRIETĂŢILOR LOR
AlN layers on Si(111) were fabricated by Hydride Vapor Phase Eptaxy (HVPE). The obtained layers were studied by using Raman spectroscopy and by scanning electron microscope (SEM). The layers surface is structured. The Raman spectra of the layers, obtained at the temperatures of 800-1100oC, are pres...
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| Format: | Article |
| Language: | English |
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Moldova State University
2007-12-01
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| Series: | Studia Universitatis Moldaviae: Stiinte reale si ale naturii |
| Online Access: | https://ojs.studiamsu.md/index.php/stiinte_reale_naturii/article/view/223 |