| Summary: | Porous germanium is a promising material for sensing applications in the mid-infrared wavelength range due to its biocompatibility, large internal surface area, open pores network and widely tunable refractive index, as well as its large spectral transparency window ranging from 2 to 15 μm. Multilayers, such as Bragg reflectors and microcavities, based on porous germanium material, are designed and their optical spectra are simulated to enable SF<sub>6</sub> gas-sensing applications at a wavelength of 10.55 µm, which corresponds to its major absorption line. The impact of both the number of successive layers and their respective porosity on the multilayer structures reflectance spectrum is investigated while favoring low layer thicknesses and thus the ease of multilayers manufacturing. The suitability of these microcavities for mid-infrared SF<sub>6</sub> gas sensing is then numerically assessed. Using an asymmetrical microcavity porous structure, a sensitivity of 0.01%/ppm and a limit of detection (LOD) around 1 ppb for the SF<sub>6</sub> gas detection are calculated. Thanks to both the porous nature allowing gases to easily infiltrate the overall structure and Ge mid-infrared optical properties, a theoretical detection limit nearly 1000 times lower than the current state of the art is simulated.
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