Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition
The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic pr...
| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-05-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/11/5/527 |
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| author | Alex Belianinov Matthew J. Burch Anton Ievlev Songkil Kim Michael G. Stanford Kyle Mahady Brett B. Lewis Jason D. Fowlkes Philip D. Rack Olga S. Ovchinnikova |
| author_facet | Alex Belianinov Matthew J. Burch Anton Ievlev Songkil Kim Michael G. Stanford Kyle Mahady Brett B. Lewis Jason D. Fowlkes Philip D. Rack Olga S. Ovchinnikova |
| author_sort | Alex Belianinov |
| collection | DOAJ |
| description | The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques. |
| first_indexed | 2024-03-10T19:39:59Z |
| format | Article |
| id | doaj.art-ae0c43b52be44250844b9d3cc2655813 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T19:39:59Z |
| publishDate | 2020-05-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ae0c43b52be44250844b9d3cc26558132023-11-20T01:21:06ZengMDPI AGMicromachines2072-666X2020-05-0111552710.3390/mi11050527Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced DepositionAlex Belianinov0Matthew J. Burch1Anton Ievlev2Songkil Kim3Michael G. Stanford4Kyle Mahady5Brett B. Lewis6Jason D. Fowlkes7Philip D. Rack8Olga S. Ovchinnikova9Center for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USADepartment of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USADepartment of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USADepartment of Materials Science and Engineering, University of Tennessee, Knoxville, TN 37996, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USACenter for Nanophase Materials Science, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USAThe next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic precursor gas to fabricate nanoscale structures in 3D with high-precision and smaller critical dimensions than focused electron beam induced deposition (FEBID), traditional liquid metal source FIBID, or other additive manufacturing technology. In this work, we report the effect of beam current, dwell time, and pixel pitch on the resultant segment and angle growth for nanoscale 3D mesh objects. We note subtle beam heating effects, which impact the segment angle and the feature size. Additionally, we investigate the competition of material deposition and sputtering during the 3D FIBID process, with helium ion microscopy experiments and Monte Carlo simulations. Our results show complex 3D mesh structures measuring ~300 nm in the largest dimension, with individual features as small as 16 nm at full width half maximum (FWHM). These assemblies can be completed in minutes, with the underlying fabrication technology compatible with existing lithographic techniques, suggesting a higher-throughput pathway to integrating FIBID with established nanofabrication techniques.https://www.mdpi.com/2072-666X/11/5/527helium ion microscopyfocused ion beam induced deposition3D nano-printingdirect-write nanofabrication |
| spellingShingle | Alex Belianinov Matthew J. Burch Anton Ievlev Songkil Kim Michael G. Stanford Kyle Mahady Brett B. Lewis Jason D. Fowlkes Philip D. Rack Olga S. Ovchinnikova Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition Micromachines helium ion microscopy focused ion beam induced deposition 3D nano-printing direct-write nanofabrication |
| title | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
| title_full | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
| title_fullStr | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
| title_full_unstemmed | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
| title_short | Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition |
| title_sort | direct write of 3d nanoscale mesh objects with platinum precursor via focused helium ion beam induced deposition |
| topic | helium ion microscopy focused ion beam induced deposition 3D nano-printing direct-write nanofabrication |
| url | https://www.mdpi.com/2072-666X/11/5/527 |
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