Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

Direct Write of 3D Nanoscale Mesh Objects with Platinum Precursor via Focused Helium Ion Beam Induced Deposition

The next generation optical, electronic, biological, and sensing devices as well as platforms will inevitably extend their architecture into the 3rd dimension to enhance functionality. In focused ion beam induced deposition (FIBID), a helium gas field ion source can be used with an organometallic pr...

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Bibliographic Details
Main Authors: Alex Belianinov, Matthew J. Burch, Anton Ievlev, Songkil Kim, Michael G. Stanford, Kyle Mahady, Brett B. Lewis, Jason D. Fowlkes, Philip D. Rack, Olga S. Ovchinnikova
Format: Article
Language:English
Published: MDPI AG 2020-05-01
Series:Micromachines
Subjects:
helium ion microscopy
focused ion beam induced deposition
3D nano-printing
direct-write nanofabrication
Online Access:https://www.mdpi.com/2072-666X/11/5/527

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