Resonant Varifocal Micromirror with Piezoresistive Focus Sensor
This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to...
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| Format: | Article |
| Language: | English |
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MDPI AG
2016-03-01
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| Series: | Micromachines |
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| Online Access: | http://www.mdpi.com/2072-666X/7/4/57 |
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| author | Kenta Nakazawa Takashi Sasaki Hiromasa Furuta Jiro Kamiya Hideki Sasaki Toshikazu Kamiya Kazuhiro Hane |
| author_facet | Kenta Nakazawa Takashi Sasaki Hiromasa Furuta Jiro Kamiya Hideki Sasaki Toshikazu Kamiya Kazuhiro Hane |
| author_sort | Kenta Nakazawa |
| collection | DOAJ |
| description | This paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (SOI) wafer and a glass wafer. A mirror plate and a counter electrode are fabricated by a top silicon layer of the SOI wafer and on the glass wafer, respectively. The piezoresistor is fabricated by ion implantation on a supporting beam of the mirror plate. The stress variation of the beam, which is detected by the piezoresistor, correspond the focal length of the varifocal mirror. The focus length varies from −41 to 35 mm at the resonant frequency of 9.5 kHz. The focal length of the varifocal mirror is monitored by the piezoresistor in real time. |
| first_indexed | 2024-12-12T08:44:27Z |
| format | Article |
| id | doaj.art-ae2104f31ceb4d82ad02e3466f3b3343 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-12T08:44:27Z |
| publishDate | 2016-03-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ae2104f31ceb4d82ad02e3466f3b33432022-12-22T00:30:37ZengMDPI AGMicromachines2072-666X2016-03-01745710.3390/mi7040057mi7040057Resonant Varifocal Micromirror with Piezoresistive Focus SensorKenta Nakazawa0Takashi Sasaki1Hiromasa Furuta2Jiro Kamiya3Hideki Sasaki4Toshikazu Kamiya5Kazuhiro Hane6Department of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, JapanDepartment of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, JapanResearch & Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, JapanResearch & Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, JapanResearch & Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, JapanResearch & Development Center, Panasonic Industrial Devices SUNX Co., Ltd.; Ushiyama-cho 2431-1, Kasugai 486-0901, JapanDepartment of Nanomechanics, Tohoku University, Aramaki-aza Aoba 6-6-01, Aoba-ku, Sendai 980-8579, JapanThis paper reports a microelectromechanical systems (MEMS) resonant varifocal mirror integrated with piezoresistive focus sensor. The varifocal mirror is driven electrostatically at a resonant frequency of a mirror plate to obtain the wide scanning range of a focal length. A piezoresistor is used to monitor the focal length of the varifocal mirror. The device is made of a silicon-on-insulator (SOI) wafer and a glass wafer. A mirror plate and a counter electrode are fabricated by a top silicon layer of the SOI wafer and on the glass wafer, respectively. The piezoresistor is fabricated by ion implantation on a supporting beam of the mirror plate. The stress variation of the beam, which is detected by the piezoresistor, correspond the focal length of the varifocal mirror. The focus length varies from −41 to 35 mm at the resonant frequency of 9.5 kHz. The focal length of the varifocal mirror is monitored by the piezoresistor in real time.http://www.mdpi.com/2072-666X/7/4/57varifocal mirrorpiezoresistorresonant vibrationmicroelectromechanical systems |
| spellingShingle | Kenta Nakazawa Takashi Sasaki Hiromasa Furuta Jiro Kamiya Hideki Sasaki Toshikazu Kamiya Kazuhiro Hane Resonant Varifocal Micromirror with Piezoresistive Focus Sensor Micromachines varifocal mirror piezoresistor resonant vibration microelectromechanical systems |
| title | Resonant Varifocal Micromirror with Piezoresistive Focus Sensor |
| title_full | Resonant Varifocal Micromirror with Piezoresistive Focus Sensor |
| title_fullStr | Resonant Varifocal Micromirror with Piezoresistive Focus Sensor |
| title_full_unstemmed | Resonant Varifocal Micromirror with Piezoresistive Focus Sensor |
| title_short | Resonant Varifocal Micromirror with Piezoresistive Focus Sensor |
| title_sort | resonant varifocal micromirror with piezoresistive focus sensor |
| topic | varifocal mirror piezoresistor resonant vibration microelectromechanical systems |
| url | http://www.mdpi.com/2072-666X/7/4/57 |
| work_keys_str_mv | AT kentanakazawa resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT takashisasaki resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT hiromasafuruta resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT jirokamiya resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT hidekisasaki resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT toshikazukamiya resonantvarifocalmicromirrorwithpiezoresistivefocussensor AT kazuhirohane resonantvarifocalmicromirrorwithpiezoresistivefocussensor |