Environment-friendly surface acoustic wave humidity sensor with sodium alginate sensing layer
A low-cost and environment-friendly surface acoustic wave (SAW) humidity sensor was fabricated on a quartz substrate using sol-gel/spin-coated sodium alginate (SA) sensing layer. The sensing mechanism is based on the frequency shift of the SAW sensor caused by both mass loading and electrical loadin...
Main Authors: | Y.C. Han, X.Y. Kong, W. Wu, J.S. Li, X. Yang, Y.J. Guo, Y.Q. Fu, Hamdi Torun, X. Xiang, Y.L. Tang, X.T. Zu |
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Format: | Article |
Language: | English |
Published: |
Elsevier
2022-06-01
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Series: | Micro and Nano Engineering |
Subjects: | |
Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007222000247 |
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