A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure
This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the result...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2007-10-01
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| Series: | Sensors |
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| Online Access: | http://www.mdpi.com/1424-8220/7/10/2389/ |
| _version_ | 1811184413812195328 |
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| author | Che-Ming Chiang Chia-Yen Lee Yu-Hsiang Wang |
| author_facet | Che-Ming Chiang Chia-Yen Lee Yu-Hsiang Wang |
| author_sort | Che-Ming Chiang |
| collection | DOAJ |
| description | This paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 É/ms-1), a high velocity measurement limit (45ms-1) and a rapid response time (0.53 s). |
| first_indexed | 2024-04-11T13:11:50Z |
| format | Article |
| id | doaj.art-ae456bcb043f43599ab0aae8aab290a1 |
| institution | Directory Open Access Journal |
| issn | 1424-8220 |
| language | English |
| last_indexed | 2024-04-11T13:11:50Z |
| publishDate | 2007-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Sensors |
| spelling | doaj.art-ae456bcb043f43599ab0aae8aab290a12022-12-22T04:22:34ZengMDPI AGSensors1424-82202007-10-017102389240110.3390/s7102389A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever StructureChe-Ming ChiangChia-Yen LeeYu-Hsiang WangThis paper presents a micro-scale air flow sensor based on a free-standingcantilever structure. In the fabrication process, MEMS techniques are used to deposit asilicon nitride layer on a silicon wafer. A platinum layer is deposited on the silicon nitridelayer to form a piezoresistor, and the resulting structure is then etched to create afreestanding micro-cantilever. When an air flow passes over the surface of the cantileverbeam, the beam deflects in the downward direction, resulting in a small variation in theresistance of the piezoelectric layer. The air flow velocity is determined by measuring thechange in resistance using an external LCR meter. The experimental results indicate that theflow sensor has a high sensitivity (0.0284 É/ms-1), a high velocity measurement limit (45ms-1) and a rapid response time (0.53 s).http://www.mdpi.com/1424-8220/7/10/2389/Flow sensorMicro-cantileverMicro-electro-mechanical-system (MEMS)Residual stress. |
| spellingShingle | Che-Ming Chiang Chia-Yen Lee Yu-Hsiang Wang A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure Sensors Flow sensor Micro-cantilever Micro-electro-mechanical-system (MEMS) Residual stress. |
| title | A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure |
| title_full | A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure |
| title_fullStr | A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure |
| title_full_unstemmed | A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure |
| title_short | A MEMS-based Air Flow Sensor with a Free-standing Micro-cantilever Structure |
| title_sort | mems based air flow sensor with a free standing micro cantilever structure |
| topic | Flow sensor Micro-cantilever Micro-electro-mechanical-system (MEMS) Residual stress. |
| url | http://www.mdpi.com/1424-8220/7/10/2389/ |
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