A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines
In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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MDPI AG
2017-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/8/10/304 |
| _version_ | 1828529068426919936 |
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| author | Huan Liu Zhongliang Yu Yan Liu Xudong Fang |
| author_facet | Huan Liu Zhongliang Yu Yan Liu Xudong Fang |
| author_sort | Huan Liu |
| collection | DOAJ |
| description | In this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into a conventional four-beam structure to meet the range requirements for the measurement of both the maximum static friction torque and the kinetic friction torque in rotating MEMS machines, as well as eliminate the problem of low sensitivity with neat membrane structure. A glass wafer is bonded onto the bottom of the sensor chip with a certain gap to protect the sensor when overloaded. The comparisons between the performances of beam-based sensor, membrane-based sensor and BM sensor are conducted by finite element method (FEM), and the final sensor dimensions are also determined. Calibration of the fabricated and packaged device is experimentally performed. The practical verification is also reported in the paper for estimating the friction torque in micro gas bearings by assembling the proposed sensor into a rotary table-based measurement system. The results demonstrate that the proposed force sensor has a potential application in measuring micro friction or force in MEMS machines. |
| first_indexed | 2024-12-11T22:01:51Z |
| format | Article |
| id | doaj.art-ae954f2779874178b7db122086a621c4 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-12-11T22:01:51Z |
| publishDate | 2017-10-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ae954f2779874178b7db122086a621c42022-12-22T00:49:05ZengMDPI AGMicromachines2072-666X2017-10-0181030410.3390/mi8100304mi8100304A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS MachinesHuan Liu0Zhongliang Yu1Yan Liu2Xudong Fang3Key Laboratory of Thin Film and Optical Manufacturing Technology, Ministry of Education, Xi’an Technological University, Xi’an 710032, ChinaSchool of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, ChinaState Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaState Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, ChinaIn this paper, a beam-membrane (BM) sensor for measuring friction torque in micro-electro-mechanical system (MEMS) gas bearings is presented. The proposed sensor measures the force-arm-transformed force using a detecting probe and the piezoresistive effect. This solution incorporates a membrane into a conventional four-beam structure to meet the range requirements for the measurement of both the maximum static friction torque and the kinetic friction torque in rotating MEMS machines, as well as eliminate the problem of low sensitivity with neat membrane structure. A glass wafer is bonded onto the bottom of the sensor chip with a certain gap to protect the sensor when overloaded. The comparisons between the performances of beam-based sensor, membrane-based sensor and BM sensor are conducted by finite element method (FEM), and the final sensor dimensions are also determined. Calibration of the fabricated and packaged device is experimentally performed. The practical verification is also reported in the paper for estimating the friction torque in micro gas bearings by assembling the proposed sensor into a rotary table-based measurement system. The results demonstrate that the proposed force sensor has a potential application in measuring micro friction or force in MEMS machines.https://www.mdpi.com/2072-666X/8/10/304beam-membrane structuremicro-force sensorMEMS bearingfriction torque |
| spellingShingle | Huan Liu Zhongliang Yu Yan Liu Xudong Fang A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines Micromachines beam-membrane structure micro-force sensor MEMS bearing friction torque |
| title | A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines |
| title_full | A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines |
| title_fullStr | A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines |
| title_full_unstemmed | A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines |
| title_short | A Micro-Force Sensor with Beam-Membrane Structure for Measurement of Friction Torque in Rotating MEMS Machines |
| title_sort | micro force sensor with beam membrane structure for measurement of friction torque in rotating mems machines |
| topic | beam-membrane structure micro-force sensor MEMS bearing friction torque |
| url | https://www.mdpi.com/2072-666X/8/10/304 |
| work_keys_str_mv | AT huanliu amicroforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT zhongliangyu amicroforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT yanliu amicroforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT xudongfang amicroforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT huanliu microforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT zhongliangyu microforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT yanliu microforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines AT xudongfang microforcesensorwithbeammembranestructureformeasurementoffrictiontorqueinrotatingmemsmachines |