Surface Depth-Mapping of Material via the Transport-of-Intensity Equation
We present a new approach for a surface characterization based on the TIE method combined with the SEM. Experimental verification is carried out on the example of characterization of a crater on the surface of monocrystalline silicon (111). The approach is universal and can be used for any opaque ob...
| المؤلفون الرئيسيون: | , , , , , |
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| التنسيق: | مقال |
| اللغة: | English |
| منشور في: |
MDPI AG
2022-10-01
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| سلاسل: | Photonics |
| الموضوعات: | |
| الوصول للمادة أونلاين: | https://www.mdpi.com/2304-6732/9/11/815 |