Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer
This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2016-09-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/10/5/10_2016jamdsm0080/_pdf/-char/en |
| _version_ | 1811291772513419264 |
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| author | Yindi CAI Xinghui LI Ryo AIHARA Ren ZONGWEI Yuki SHIMIZU So ITO Wei GAO |
| author_facet | Yindi CAI Xinghui LI Ryo AIHARA Ren ZONGWEI Yuki SHIMIZU So ITO Wei GAO |
| author_sort | Yindi CAI |
| collection | DOAJ |
| description | This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional one-axis Lloyd's mirror interferometer, computer simulation is carried out based on wave optics. Three-dimensional light intensity distributions of the fringe patterns are calculated to investigate the effect of the polarization modulation. In addition, a relationship between the asymmetry of the cross-sectional profiles of the grating pattern structures and the designed grating pattern period is also investigated. Furthermore, pattern exposure tests have been carried out by using a prototype optical setup for the modified two-axis Lloyd's mirror interferometer. |
| first_indexed | 2024-04-13T04:34:31Z |
| format | Article |
| id | doaj.art-aec40025501b4f208312861332271c06 |
| institution | Directory Open Access Journal |
| issn | 1881-3054 |
| language | English |
| last_indexed | 2024-04-13T04:34:31Z |
| publishDate | 2016-09-01 |
| publisher | The Japan Society of Mechanical Engineers |
| record_format | Article |
| series | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| spelling | doaj.art-aec40025501b4f208312861332271c062022-12-22T03:02:13ZengThe Japan Society of Mechanical EngineersJournal of Advanced Mechanical Design, Systems, and Manufacturing1881-30542016-09-01105JAMDSM0080JAMDSM008010.1299/jamdsm.2016jamdsm0080jamdsmInvestigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometerYindi CAI0Xinghui LI1Ryo AIHARA2Ren ZONGWEI3Yuki SHIMIZU4So ITO5Wei GAO6Department of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityDepartment of Nanomechanics, Tohoku UniversityThis paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional one-axis Lloyd's mirror interferometer, computer simulation is carried out based on wave optics. Three-dimensional light intensity distributions of the fringe patterns are calculated to investigate the effect of the polarization modulation. In addition, a relationship between the asymmetry of the cross-sectional profiles of the grating pattern structures and the designed grating pattern period is also investigated. Furthermore, pattern exposure tests have been carried out by using a prototype optical setup for the modified two-axis Lloyd's mirror interferometer.https://www.jstage.jst.go.jp/article/jamdsm/10/5/10_2016jamdsm0080/_pdf/-char/engratinginterference lithographylloyd's mirror interferometerwave opticsmicro patterns |
| spellingShingle | Yindi CAI Xinghui LI Ryo AIHARA Ren ZONGWEI Yuki SHIMIZU So ITO Wei GAO Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer Journal of Advanced Mechanical Design, Systems, and Manufacturing grating interference lithography lloyd's mirror interferometer wave optics micro patterns |
| title | Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer |
| title_full | Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer |
| title_fullStr | Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer |
| title_full_unstemmed | Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer |
| title_short | Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer |
| title_sort | investigation on the three dimensional light intensity distribution of the fringe patterns generated by a modified two axis lloyd apos s mirror interferometer |
| topic | grating interference lithography lloyd's mirror interferometer wave optics micro patterns |
| url | https://www.jstage.jst.go.jp/article/jamdsm/10/5/10_2016jamdsm0080/_pdf/-char/en |
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