Investigation on the three-dimensional light intensity distribution of the fringe patterns generated by a modified two-axis Lloyd's mirror interferometer
This paper presents a design study of an optical configuration for the fabrication of a two-dimensional grating, which will be used as a scale in a planar encoder system. For the modified two-axis Lloyd's mirror interferometer, in which major modifications have been made to the conventional...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2016-09-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/10/5/10_2016jamdsm0080/_pdf/-char/en |