Perspective: Highly ordered MoS2 thin films grown by multi-step chemical vapor deposition process
We established a process for growing highly ordered MoS2 thin films. The process consists of four steps: MoO3 thermal evaporation, first annealing, sulfurization, and second annealing. The main feature of this process is that thermally deposited MoO3 thin films are employed as a precursor for the Mo...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2016-03-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/1.4943288 |