Development of a Broadband (100–240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films

Development of a Broadband (100–240 MHz) Surface Acoustic Wave Emitter Devoted to the Non-Destructive Characterization of Sub-Micrometric Thin Films

In the ultrasonic non-destructive evaluation of thin films, it is essential to have ultrasonic transducers that are able to generate surface acoustic waves (SAW) of suitably high frequencies in a wide frequency range of between ten and several hundred megahertz. If the characterization is carried ou...

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Bibliographic Details
Main Authors: Marc Duquennoy, Nikolay Smagin, Tahar Kadi, Mohammadi Ouaftouh, Frédéric Jenot
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Sensors
Subjects:
chirped interdigital transducers
surface acoustic waves
SAW dispersion
very high frequency (VHF)
thin films
Online Access:https://www.mdpi.com/1424-8220/22/19/7464

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