Bessel Beam Dielectrics Cutting with Femtosecond Laser in GHz-Burst Mode

We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, w...

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Bibliographic Details
Main Authors: Pierre Balage, Théo Guilberteau, Manon Lafargue, Guillaume Bonamis, Clemens Hönninger, John Lopez, Inka Manek-Hönninger
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/9/1650
Description
Summary:We report, for the first time to the best of our knowledge, Bessel beam dielectrics cutting with a femtosecond laser in GHz-burst mode. The non-diffractive beam shaping is based on the use of an axicon and allows for cutting glasses up to 1 mm thickness with an excellent cutting quality. Moreover, we present a comparison of the cutting results with the state-of-the-art method, consisting of short MHz-bursts of femtosecond pulses. We further illustrate the influence of the laser beam parameters such as the burst energy and the pitch between consecutive Bessel beams on the machining quality of the cutting plane and provide process windows for both regimes.
ISSN:2072-666X