Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces
Abstract Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow respo...
| Main Authors: | , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-04-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-024-47408-z |
| _version_ | 1797209226970398720 |
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| author | Yuan Zhang Xiaomeng Zhou Nian Zhang Jiaqi Zhu Ningning Bai Xingyu Hou Tao Sun Gang Li Lingyu Zhao Yingchun Chen Liu Wang Chuan Fei Guo |
| author_facet | Yuan Zhang Xiaomeng Zhou Nian Zhang Jiaqi Zhu Ningning Bai Xingyu Hou Tao Sun Gang Li Lingyu Zhao Yingchun Chen Liu Wang Chuan Fei Guo |
| author_sort | Yuan Zhang |
| collection | DOAJ |
| description | Abstract Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to ~0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range. |
| first_indexed | 2024-04-24T09:51:20Z |
| format | Article |
| id | doaj.art-b02299dd8f7144a9b4b5ec04df8ba2d4 |
| institution | Directory Open Access Journal |
| issn | 2041-1723 |
| language | English |
| last_indexed | 2024-04-24T09:51:20Z |
| publishDate | 2024-04-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj.art-b02299dd8f7144a9b4b5ec04df8ba2d42024-04-14T11:22:39ZengNature PortfolioNature Communications2041-17232024-04-0115111110.1038/s41467-024-47408-zUltrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfacesYuan Zhang0Xiaomeng Zhou1Nian Zhang2Jiaqi Zhu3Ningning Bai4Xingyu Hou5Tao Sun6Gang Li7Lingyu Zhao8Yingchun Chen9Liu Wang10Chuan Fei Guo11Department of Materials Science and Engineering, Southern University of Science and TechnologyCAS Key Laboratory of Human-Machine Intelligence-Synergy Systems, Shenzhen Institutes of Advanced Technology, Chinese Academy of SciencesCAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of ChinaDepartment of Materials Science and Engineering, Southern University of Science and TechnologyDepartment of Materials Science and Engineering, Southern University of Science and TechnologyDepartment of Materials Science and Engineering, Southern University of Science and TechnologyDepartment of Computer Science and Engineering, Southern University of Science and TechnologyDepartment of Materials Science and Engineering, Southern University of Science and TechnologyDepartment of Materials Science and Engineering, Southern University of Science and TechnologyScience and Technology Committee, Commercial Aircraft Corporation of China Ltd.CAS Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of ChinaDepartment of Materials Science and Engineering, Southern University of Science and TechnologyAbstract Flexible pressure sensors can convert mechanical stimuli to electrical signals to interact with the surroundings, mimicking the functionality of the human skins. Piezocapacitive pressure sensors, a class of most widely used devices for artificial skins, however, often suffer from slow response-relaxation speed (tens of milliseconds) and thus fail to detect dynamic stimuli or high-frequency vibrations. Here, we show that the contact-separation behavior of the electrode-dielectric interface is an energy dissipation process that substantially determines the response-relaxation time of the sensors. We thus reduce the response and relaxation time to ~0.04 ms using a bonded microstructured interface that effectively diminishes interfacial friction and energy dissipation. The high response-relaxation speed allows the sensor to detect vibrations over 10 kHz, which enables not only dynamic force detection, but also acoustic applications. This sensor also shows negligible hysteresis to precisely track dynamic stimuli. Our work opens a path that can substantially promote the response-relaxation speed of piezocapacitive pressure sensors into submillisecond range and extend their applications in acoustic range.https://doi.org/10.1038/s41467-024-47408-z |
| spellingShingle | Yuan Zhang Xiaomeng Zhou Nian Zhang Jiaqi Zhu Ningning Bai Xingyu Hou Tao Sun Gang Li Lingyu Zhao Yingchun Chen Liu Wang Chuan Fei Guo Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces Nature Communications |
| title | Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces |
| title_full | Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces |
| title_fullStr | Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces |
| title_full_unstemmed | Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces |
| title_short | Ultrafast piezocapacitive soft pressure sensors with over 10 kHz bandwidth via bonded microstructured interfaces |
| title_sort | ultrafast piezocapacitive soft pressure sensors with over 10 khz bandwidth via bonded microstructured interfaces |
| url | https://doi.org/10.1038/s41467-024-47408-z |
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