Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Tailoring electron beams with high-frequency self-assembled magnetic charged particle micro optics

Electron beam manipulation is important for their application in microscopes, lithography instruments, and colliders. Here the authors report a wafer scale, self-assembled, microcoil electrically-driven magnetic charge particle optic device that can be implemented into different configurations for c...

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Bibliographic Details
Main Authors: R. Huber, F. Kern, D. D. Karnaushenko, E. Eisner, P. Lepucki, A. Thampi, A. Mirhajivarzaneh, C. Becker, T. Kang, S. Baunack, B. Büchner, D. Karnaushenko, O. G. Schmidt, A. Lubk
Format: Article
Language:English
Published: Nature Portfolio 2022-06-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-022-30703-y

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