Localized Surface Hydrophilicity Tailoring of Polyimide Film for Flexible Electronics Manufacturing Using an Atmospheric Pressure Ar/H<sub>2</sub>O Microplasma Jet

Localized Surface Hydrophilicity Tailoring of Polyimide Film for Flexible Electronics Manufacturing Using an Atmospheric Pressure Ar/H<sub>2</sub>O Microplasma Jet

The poor hydrophilicity of polyimide (PI) films limits their applications in flexible electronics, such as in wearable and implantable bio-MEMS devices. In this paper, an atmospheric pressure Ar/H<sub>2</sub>O microplasma jet (μAPPJ) with a nozzle diameter of 100 μm was utilized to site-...

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Bibliographic Details
Main Authors: Bowen Ji, Tao Wang, Meng Li, Liping Shi, Xiaoli You, Fanqi Sun, Haiwen Luan
Format: Article
Language:English
Published: MDPI AG 2022-10-01
Series:Micromachines
Subjects:
microplasma jet
polyimide film micromachining
surface modification
hydrophilicity tailoring
Online Access:https://www.mdpi.com/2072-666X/13/11/1853

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